Comparison of metal chloride-doped graphene electrode fabrication processes for GaN-based light emitting diodes

Kwon, Ki Chang; Kim, Buem Jun; Kim, Cheol-Min; Lee, Jong‐Lam; Kim, Soo Young

doi:10.1039/c4ra09446h

Cited by 5 publications

(1 citation statement)

References 28 publications

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“…[27][28][29][30][31][32] As a standard method of micro-fabrication, lithography involves several process steps to achieve the final device structure, namely photoresist deposition, UV light exposure, O 2 plasma etching, and so on. These processes, although material-friendly in most cases, are not congenial in graphene-based device fabrication, [33][34][35] especially when unintentional doping of graphene is a real concern. Under the aforementioned circumstances, there are a few major challenges in the development of graphene-based flexible electronics; 1) high-yield transfer of CVD-grown graphene on desired flexible substrates, 2) retaining the intrinsic property of graphene even after the transfer process, and 3) pattern formation without damaging the graphene.…”

Section: Doi: 101002/adem202301810mentioning

confidence: 99%

Parafilm Enabled Rapid and Scalable Delamination/Integration of Graphene for High‐Performance Capacitive Touch Sensor

Durairaj,

Ali,

Yoo

et al. 2024

Adv Eng Mater

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The high electrical conductivity and bendability of graphene makes it versatile for flexible electronic sensor applications. The fabrication of such flexible sensors necessitates two important prerequisites: defect‐free transfer of graphene to a flexible substrate and creating appropriate patterns without altering graphene’s inherent properties. Here, we report a potentially rapid and scalable method to delaminate graphene non‐destructively from a metal substrate by using flexible Parafilm®. This method allows not only the scalable transfer of continuous graphene, but also the realization of graphene patterns on the parafilm substrate. Graphene on parafilm showed negligible doping effect with high room temperature carrier mobility exceeding 6×103 cm2V‐1s‐1 for a centimeter‐scale sample. Using parafilm as a substrate‐cum‐dielectric medium, we demonstrate a proof‐of‐concept capacitive touch sensor (CTS) arrays without the use of lithography, by simple cross‐assembling and mild heating. The graphene sensor thus realized in its simplistic device configuration had an enhanced sensitivity of 43% when touch and release cycles are performed on the device. The nearly non‐destructive and user‐friendly route for directly integrating graphene with a flexible substrate is expected to play a potential role in the design of graphene‐based flexible electronics.This article is protected by copyright. All rights reserved.

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Section: Doi: 101002/adem202301810mentioning

confidence: 99%

Parafilm Enabled Rapid and Scalable Delamination/Integration of Graphene for High‐Performance Capacitive Touch Sensor

Durairaj,

Ali,

Yoo

et al. 2024

Adv Eng Mater

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Graphene doping for electrode application

Hasani

Kim

2020

Graphene for Flexible Lighting and Displays

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Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates

Kim

Hwang

et al. 2015

Langmuir

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Graphene, a two-dimensional carbon material, has attracted significant interest for applications in flexible electronics as an alternative transparent electrode to indium tin oxide. However, it still remains a challenge to develop a simple, reproducible, and controllable fabrication technique for producing homogeneous large-scale graphene films and creating uniform patterns with desired shapes at defined positions. Here, we present a simple route to scalable fabrication of flexible transparent graphene electrodes using an oxygen plasma etching technique in a capacitively coupled plasma (CCP) system. Ascorbic acid-assisted chemical reduction enables the large-scale production of graphene with solution-based processability. Oxygen plasma in the CCP system facilitates the reproducible patterning of graphene electrodes, which allows controllable feature sizes and shapes on flexible plastic substrates. The resulting graphene electrode exhibits a high conductivity of 80 S cm(-1) and a transparency of 76% and retains excellent flexibility upon hard bending at an angle of ±175° and after repeated bending cycles. A simple LED circuit integrated on the patterned graphene film demonstrates the feasibility of graphene electrodes for use in flexible transparent electrodes.

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Comparison of metal chloride-doped graphene electrode fabrication processes for GaN-based light emitting diodes

Abstract: The metal chloride doped graphene (D-G) enhanced the electrical properties of the light emitting diodes (LEDs). Therefore, avoiding the inductively coupled plasma etching step is better for D-G electrodes in GaN-based LEDs.

Cited by 5 publications

References 28 publications

Parafilm Enabled Rapid and Scalable Delamination/Integration of Graphene for High‐Performance Capacitive Touch Sensor

Parafilm Enabled Rapid and Scalable Delamination/Integration of Graphene for High‐Performance Capacitive Touch Sensor

Graphene doping for electrode application

Large-Scale Plasma Patterning of Transparent Graphene Electrode on Flexible Substrates

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