2007
DOI: 10.1109/tmtt.2006.889350
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Comparison of Techniques for Microwave Characterization of BST Thin Films

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Cited by 19 publications
(15 citation statements)
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“…In a second step, the initial estimates resulting from the matrix-pencil two-line method were refined by a resonant method that relies on a straight coplanar resonator (CPR) [ 35 ]. By matching the measured S-parameters to the simulated resonances by varying both and in CST Microwave Studio’s frequency domain (FD) electromagnetic field simulator, more accurate values for both parameters were determined.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…In a second step, the initial estimates resulting from the matrix-pencil two-line method were refined by a resonant method that relies on a straight coplanar resonator (CPR) [ 35 ]. By matching the measured S-parameters to the simulated resonances by varying both and in CST Microwave Studio’s frequency domain (FD) electromagnetic field simulator, more accurate values for both parameters were determined.…”
Section: Methodsmentioning
confidence: 99%
“…Because the resonance frequencies of the CPR correspond to the resonant line’s length being (approximately) a multiple of half-a-wavelength [ 35 , 36 ], the longer resonator exhibits more resonance peaks than the shorter one. Therefore, it can be used to complement and fine-tune the results from the latter, especially over a broad frequency range.…”
Section: Methodsmentioning
confidence: 99%
“…Systematic errors associated with conformal mapping when the gap between the signal and ground lines of the co-planar waveguides is comparable with the thickness of the film have been reported [15]. For wide gaps, consistency between resonator, co-planar waveguide and capacitance measurements has been demonstrated [16].…”
Section: Introductionmentioning
confidence: 96%
“…The choice of the measurement method and the correspondingly type of measurement setup strongly depends on the frequency range, on the form of the high dielectric constant material, and on the application of the final device. A comparison of film characterization techniques for microwave materials, involving coplanar waveguides (CPWs), coplanar resonators and interdigital capacitors (IDCs) made with high temperature superconductors printed over the film to be characterized was presented in [ 11], where good agreement among results for barium strontium titanate (BST) thin films was found. In [12], accurate measurement of BST‐0.5 (Ba 0.5 Sr 0.5 TiO 3 ) thin‐film based components and their characterization was performed using CPWs and IDCs, inferring the complex dielectric constant from scattering parameter measurements.…”
Section: Introductionmentioning
confidence: 99%