2016
DOI: 10.1088/0963-0252/25/3/035015
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Comparison of theBfield dependency of plasma parameters of a weakly magnetized inductive and Helicon hydrogen discharge

Abstract: The discharge properties of a weakly magnetized inductively coupled hydrogen discharge (operating pressure 1 Pa) are evaluated by using optical emission spectroscopy. The behaviour of the electron density n e , temperature T e and the density ratio of atomic to molecular hydrogen n H /n H2 with varying magnetic field strength (up to 12 mT) is investigated. The results obtained from the OES measurements performed with a line of sight directed along the central axis of the cylindrical discharge vessel are compar… Show more

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Cited by 13 publications
(13 citation statements)
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“…This LOS is used for recording lateral intensity profiles of the atomic b H emission line at particular z positions. From these measurements, the radial emission profile of b H is determined via Abel inversion as described in [19]. Prerequisites of the numerical approach are a cylindrical symmetry of the emission and a negligible optical thickness of the emission line.…”
Section: Charliementioning
confidence: 99%
“…This LOS is used for recording lateral intensity profiles of the atomic b H emission line at particular z positions. From these measurements, the radial emission profile of b H is determined via Abel inversion as described in [19]. Prerequisites of the numerical approach are a cylindrical symmetry of the emission and a negligible optical thickness of the emission line.…”
Section: Charliementioning
confidence: 99%
“…Via Abel inversion, the lateral intensity profiles are numerically transformed into radial emission profiles (r) [17]. For this setup, the followed approach is described in detail in [7]. Requirements for an application of the Abel inversion are the cylindrical symmetry of the discharge and a negligible optical thickness of the detected emission line.…”
Section: Optical Emission Spectroscopy and Collisional Radiative Modementioning
confidence: 99%
“…Requirements for an application of the Abel inversion are the cylindrical symmetry of the discharge and a negligible optical thickness of the detected emission line. Due to the geometry of the experiment and the low population density of the lower state n = 2 of the H β line, both requirements are fulfilled for this setup [7].…”
Section: Optical Emission Spectroscopy and Collisional Radiative Modementioning
confidence: 99%
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“…Instead of aiming to operate in the full helicon mode for which several 100 mT are required, the investigations are focussed to achieve the better coupling due to the so-called low-field peak [19]. It has already been demonstrated that the low-field peak appears below 10 mT in hydrogen and deuterium plasmas at the relevant source pressure, showing that in the peak a higher dissociation degrees and plasma densities are achieved [20]. Further studies concentrate on the dependence on the RF frequency and source diameter to optimize the system.…”
Section: Randd On Innovative Ion Sourcesmentioning
confidence: 99%