2016
DOI: 10.1007/s00170-016-8412-z
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Comparison on foil EDM characteristics of single crystal SiC between in deionized water and in EDM oil

Abstract: Slicing of single crystal silicon carbide (SiC) wafers by commonly used abrasive wire saw method is very time and cost consuming due to its extreme high hardness. This problem becomes more serious with the increase of SiC ingot diameter. Therefore, electrical discharge machining (EDM), which is a thermal process regardless of workpiece hardness, is developing as an alternative method for slicing SiC. In this study, EDM of SiC by a foil tool electrode was proposed for slicing SiC. Comparative experiments of foi… Show more

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Cited by 19 publications
(6 citation statements)
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“…20 show that the craters generated in ultrapure water are slightly smaller than those in EDM oil, and the surface roughness Ra is slightly higher than those in EDM oil. This is also consistent with previous research [43]. The reason is that the expansion of the plasma channel in ultrapure water is more limited, so the plasma channel has a higher energy density than that in EDM oil.…”
Section: Effects Of Dielectric Fluidsupporting
confidence: 93%
“…20 show that the craters generated in ultrapure water are slightly smaller than those in EDM oil, and the surface roughness Ra is slightly higher than those in EDM oil. This is also consistent with previous research [43]. The reason is that the expansion of the plasma channel in ultrapure water is more limited, so the plasma channel has a higher energy density than that in EDM oil.…”
Section: Effects Of Dielectric Fluidsupporting
confidence: 93%
“…Elemental Al is considered to be from the aluminum powder added to the working fluid adhering to the surface of the workpiece. Except for the appearance of Al, the same analysis result was obtained in the analysis of the EDM'd surface in EDM oil [27].…”
Section: Difference In Surface Integritysupporting
confidence: 59%
“…Meanwhile, the studies of discharge characteristics in mixed two-phase medium are limited to the gas-liquid. 15,16 There are two important theories about the mechanism of the onset and development of discharge in gas medium, that are Towensed theory and Streamer theory, respectively. 17–19 The main points for the mechanism of the breakdown discharge theories in liquid medium including: the electron discharge in gas medium, the bubble discharge, and the breakdown discharge of impurities.…”
Section: Introductionmentioning
confidence: 99%