Comparison Study from Sputtering, Sol-Gel, and ALD Processes Developing Embedded Thin Film Capacitors

Ahn, Jinyong; Lee, Joseph Y.; Kim, Joonsung; Yoo, Je-Gwang; Ryu, Chunghyun

doi:10.1109/icept.2006.359875

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2011

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“…Sol-gel films on the other hand can be deposited on smaller areas with similar surface smoothness (Ra). At the same time, sol-gel films have an advantage of being processed in a shorter time [16].…”

Section: Structural Characteristicsmentioning

confidence: 99%

Electrical and Structural Diagnostics of Barium Strontium Titanate (BST) Thin Films

et al. 2011

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The properties of radio frequency, rf magnetron sputtered Barium Strontium Titanate (Ba 1-x Sr x TiO 3 ), BST, thin films were investigated and compared with BST thin films deposited by solgel method with the aim of determining relationships between the oxide deposition parameters, the film structure, and the electric field dependence. This work presents noncontact electrical characterization of BST films using Corona Kelvin metrology (C-KM) which has been employed earlier only in the silicon industry. The films were structurally characterized using thickness profilometer, X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. The use of sol-gel technique to fabricate small area metal-insulator-metal (MIM) structures is found to be beneficial from the point of saving fabrication time and production costs.

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Section: Structural Characteristicsmentioning

confidence: 99%