2016
DOI: 10.3849/aimt.01120
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Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber

Abstract: The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.

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Cited by 15 publications
(14 citation statements)
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“…The designed nozzle diameter was 1.5 mm, with 0.5 mm length and opening angle 12 • according to Daněk [4]. The next step was to calculate the appropriate shape and spot to place the probe with the thermocouple system [5,6], which is crucial to maximize the utilization of the cryogenic temperature within the supersonic flow [7][8][9][10].…”
Section: +1mentioning
confidence: 99%
“…The designed nozzle diameter was 1.5 mm, with 0.5 mm length and opening angle 12 • according to Daněk [4]. The next step was to calculate the appropriate shape and spot to place the probe with the thermocouple system [5,6], which is crucial to maximize the utilization of the cryogenic temperature within the supersonic flow [7][8][9][10].…”
Section: +1mentioning
confidence: 99%
“…The pressure and shock wave distribution in the primary path of the electron beam passing through the differentially pumped chamber has a great influence on the resulting image quality [ 1 , 2 , 3 ]. The environmental scanning electron microscope (ESEM) is one of the most promising tools for studying plant [ 4 , 5 , 6 ] and polymer [ 7 , 8 ] samples using special signal electron detectors [ 9 ], which were developed based on gas flow simulations.…”
Section: Introductionmentioning
confidence: 99%
“…The flow is influenced by the shape of the sample, pumping speed, and ESEM aperture diameter. The flow speed was simulated as described previously (Maxa, 2011(Maxa, , 2016.…”
Section: Environmental Scanning Electron Microscopementioning
confidence: 99%