Compensated differential Zernike fitting method for wavefront aberration metrology based on grating lateral shearing

Tang, Feng; Wang, Xiangzhao

doi:10.1364/ao.441092

Cited by 6 publications

(2 citation statements)

References 28 publications

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“…The Ronchi test measures the aberrations of imaging lenses with the interference patterns produced by a grating. However, the accuracy is limited when the light source does not have good monochromaticity, and strict alignment is needed for the grating [1,4,5]. The star test analyzes the aberrations by examining the images of a point source formed by the lenses under test (LUT) and compares them with the ideal image form, which depends heavily on experience [1].…”

Section: Introductionmentioning

confidence: 99%

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Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

Ruan

et al. 2022

Applied Sciences

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Lenses play an important role in imaging systems. Having an effective way to test the aberrations of imaging lenses is important. However, the existing methods cannot satisfy the requirements in some conditions. To overcome these difficulties, wavefront aberration measurement deflectometry (WAMD) is proposed in this paper, which can reconstruct the wavefront aberrations of imaging lenses by measuring the angular aberrations. The principle of WAMD is analyzed in detail, and the correctness and feasibility of the proposed method are verified by both a simulation and an experiment. A telephoto lens and a single imaging lens were tested in an experiment, and the RMS errors were 166.8 nm (5.71%) () and 58.9nm (4.74%) (), respectively, as compared with the interferometer’s results. This method is widely applicable with relatively reasonable accuracy. It has potential to be applied in the lens manufacturing and alignment process.

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Section: Introductionmentioning

confidence: 99%

“…Compared with traditional methods [1][2][3][4][5][6][7][8][9][10], WAMD is more flexible and can achieve sub-wavelength-level accuracy. Although its accuracy cannot achieve the same level as that of interferometry test, it can work in situations where the aberration is too large to be tested by an interferometer [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

Ruan

et al. 2022

Applied Sciences

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Simple Non‐Destructive and 3D Multi‐Layer Visual Hull Reconstruction with an Ultrabroadband Carbon Nanotubes Photo‐Imager

Li,

Kinoshita,

Shikichi

et al. 2023

Advanced Optical Materials

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While millimeter‐wave (MMW)–infrared (IR) broad photo‐imaging exhibits significant potential as an inspection technique, photo‐thermoelectric (PTE) detector operations employing carbon nanotubes (CNTs) are highly suitable because of their efficient absorption characteristics in the above bands. Such an imaging device design and the associated material coordination allow the aggregation of multiple wavelength‐specific optical information for the constituent identification of target objects in a non‐destructive manner with high sensitivity. On the other side, computer vision techniques facilitate 3D structure reconstruction as approaches from inspection methodologies, in addition to the aforementioned imaging device design. Although non‐destructive inspections require collectively satisfying both constituent identification and structural reconstruction, investigations combining MMW–IR broad photo imaging and computer vision monitoring are still insufficient. This work demonstrates computer vision‐driven simple 3D composite multi‐layer reconstructions via non‐destructive broadband multiple‐wavelength monitoring with the CNT film PTE imager. Visual hull evaluation, which is one of the representative computer vision techniques, converts 2D transmissive PTE images with different viewpoints into 3D reconstruction models. The subsequential graphical superposition of these wavelength‐specific models results in non‐destructive entire reconstructions of 3D composite multi‐layer target objects. Therefore, the present computer vision‐driven PTE broadband 3D reconstruction bridges the gap between methodologies and device design strategies toward non‐destructive inspection applications.

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Distortion measurement of a lithography projection lens based on multichannel grating lateral shearing interferometry

Cao,

Lu,

Feng

et al. 2024

Appl. Opt.

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The optical distortion of the lithographic projection lens can reduce imaging quality and cause overlay errors in lithography, thus preventing the miniaturization of printed patterns. In this paper, we propose a technique to measure the optical distortion of a lithographic projection lens by sensing the wavefront aberrations of the lens. A multichannel dual-grating lateral shearing interferometer is used to measure the wavefront aberrations at several field points in the pupil plane simultaneously. Then, the distortion at these field points is derived according to the proportional relationship between the Z2 and Z3 Zernike terms (the tilt terms) and the image position shifts. Without the need for additional devices, our approach can simultaneously retrieve both the wavefront aberrations and the image distortion information. Consequently, it improves not only measurement speed and accuracy but also enables accounting for displacement stage positioning error. Experiments were conducted on a lithographic projection lens with a numerical aperture of 0.57 to verify the feasibility of the proposed method.

show abstract

Compensated differential Zernike fitting method for wavefront aberration metrology based on grating lateral shearing

Cited by 6 publications

References 28 publications

Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

Simple Non‐Destructive and 3D Multi‐Layer Visual Hull Reconstruction with an Ultrabroadband Carbon Nanotubes Photo‐Imager

Distortion measurement of a lithography projection lens based on multichannel grating lateral shearing interferometry

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