Back passivation of CdTe solar cells was done using silicon di oxide (SiO 2 ) and silicon nitride (SiN x ) and its effect was seen on dark I-V, light J-V and C-V characteristics. We also did the annealing of solar cell which further changes the performance of solar cell. Solar cells show enhancement in performance with SiO 2 passivation and annealing after SiO 2 . There is no enhancement in performance with SiN x but it improves by doing annealing after SiN x .