Compensation of the stress dependence of flexible integrated capacitive pressure sensors for biomedical applications

Fischer, Roland A.; Müntjes, Jutta A.; Mokwa, W.

doi:10.1109/icsens.2017.8234177

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…The methods to improve the sensitivity of micro-capacitive pressure sensors are studied. Their specific application fields mainly include the industrial environment with high temperature and humidity (such as aircraft engine) [5], the biomedical field (used to detect patients' physical conditions) [6] and the robot field (used to achieve robot vision) [7]. This paper is expected to provide some helpful suggestions for the deeper research involving micro-capacitive pressure sensors in these fields.…”

Section: Introductionmentioning

confidence: 99%

Methods to improve the sensitivity of micro-capacitive pressure sensors

Wang

2023

J. Phys.: Conf. Ser.

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Novel micro pressure sensors require high sensitivity, anti-interference, reliability and durability. However, due to some problems in mold making, digital signal process circuits and so on, it is difficult for the existing micro-capacitive pressure sensors to make a breakthrough in sensitivity. Firstly, this paper briefly introduces the micro-pressure capacitive sensors principle and the technical difficulties they face. After that, several schemes are listed, including digital signal process circuits, laser-induced graphene, etc. The feasibility and practicability of these methods to improve the sensitivity of micro-capacitive pressure sensors are compared and demonstrated. The following types of pressure sensors, including PDMS-based and MEMS-based pressure sensors, have their specific functions and shortcomings. The paper aims to provide some references for further research in this field, and to give some useful opinions on the practical application of micro-capacitive pressure sensors in IoT and other fields.

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Section: Introductionmentioning

confidence: 99%

Methods to improve the sensitivity of micro-capacitive pressure sensors

Wang

2023

J. Phys.: Conf. Ser.

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“…Pressure measurement in harsh environments is of great value in various fields, such as oil logging, aerospace vehicle engine testing, and in the pharmaceutical industry [1][2][3]. At present, pressure sensors used in engineering mainly include piezoresistive pressure sensors, piezoelectric pressure sensors, capacitive pressure sensors, and fiber optic pressure sensors [4][5][6][7]. Compared with the electrical sensor, the fiber optic sensor has unique advantages.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements

Zhou

Jia

Liu

et al. 2020

Sensors

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A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.

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