a-plane GaN grown on (1-102) r-plane sapphire substrate was obtained by metal organic chemical vapor deposition. The optical and electrical properties of the Si-doped a-plane GaN films were investigated by photoluminescence spectroscopy, high-resolution X-ray diffraction, atomic force microscopy and Hall measurement. The results showed that the morphology and the crystal quality slightly degraded with Si doping. The yellow luminescence was enhanced with increasing the flow rate of the SiH 4 . The significant improvement of the mobility should associate with some of the vacancy filled with the Si.
GaN, nonpolar, dislocation, photoluminescenceCitation: Xu S R, Zhou X W, Hao Y, et al. Optical and electrical properties of Si-doped in a-plane GaN grown on r-plane sapphire.AlGaN/GaN heterostructures have shown the excellent properties in advanced power and optoelectronic devices, such as high electron mobility transistors (HEMTs) and light-emitting diodes (LEDs). It has also been found that the wurtzite phase AlGaN/GaN exhibits huge spontaneous and piezoelectronic polarization effects that negatively impact the performance of LED. It is due to that the spatial separation of electrons and holes in quantum well with c-axis orientation seriously reduces the oscillator strength thereby causes a redshift of emission wavelength, which is called the quantum confined Stark effect. On the other hand, the extra-ordinarily high polarization charges make it difficult to enable normally-off operations on the c-plane face. To circumvent this problem, a material growth with non-polar crystal orientation was developed [1-3]. Masayuki et al. analyzed a non-polar type a-plane (11-20) AlGaN/GaN HFET free from polarization, and concluded that the polarization was not formed perpendicular to the heterointerface so the device could allow nearly normally-off operations [4]. However, the extended defect densities in non-polar a-plane (11)(12)(13)(14)(15)(16)(17)(18)(19)(20) GaN were yet very high according to the state-of-the-art of material growth technology. For the a-plane (11-20) GaN on r-plane (1-102) grown by metal organic chemical vapor deposition (MOCVD), there occurred a TD density of 3×10 10 cm −2 and a basal stacking fault density of 3.5×10 5 cm −1 [5]. So the electron mobility of the as-grown a-plane GaN films was very low. It was only 5.14 cm 2 /Vs in Masayuki Kuroda's work. In this paper, a-plane GaN films with different Si doping concentrations were grown by MOCVD. Their optical, surface morphology, structural and electrical properties were studied by photoluminescence spectrum (PL), atomic force microscopy (AFM), high-resolution X-ray diffraction (HRXRD) and Hall measurements.