Complementary physicochemical analysis by ellipsometry and Auger spectroscopy of nano-sized protective coating layers

Petrik, P.; Racz, A.S.; Menyhárd, M.

doi:10.1016/j.apsusc.2020.147593

Cited by 4 publications

(2 citation statements)

References 37 publications

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“…Investigations on film surface and interfaces have been carried out using other techniques also such as secondary ion mass spectroscopy (SIMS) and X-ray photoelectron spectroscopy (XPS) and Auger spectroscopy with sputtering. [4][5][6] However, due to destructive nature of these techniques, significant relaxations and modifications may occur in the film structure during measurements, and therefore, reliable interpretations from the measurements become quite difficult. 7,8 In grazing incidence X-ray fluorescence (GIXRF) technique, antinode positions of X-ray standing waves (XSWs) can be varied across the depth by changing grazing incidence angle.…”

Section: X-ray Reflectivity (Xrr) Is a Well-established Technique For Surfacementioning

confidence: 99%

Surface and interface characterization of Ru/C/Ru trilayer structure using grazing incidence X‐ray reflectivity and X‐ray fluorescence

Kiranjot

Dhawan

Modi

2021

Surface & Interface Analysis

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In 8-to 20-keV photon energy region, ruthenium and carbon thin films are used in multilayer monochromators. In the present study, this material combination is explored for X-ray waveguide applications in hard X-ray region. The structural parameters (thickness of each layer) of Ru/C/Ru waveguide structure are optimized to get maximum intensity enhancement of fundamental mode inside carbon guiding layer. A sample with optimized structural parameters is deposited using ion beam sputtering (IBS) technique and characterized using X-ray reflectivity (XRR) and grazing incidence X-ray fluorescence (GIXRF) techniques. The analysis suggests that the density of bottom Ru layer and carbon guiding layer is close to bulk density ($97% for Ru and $95% for carbon), whereas density of top Ru layer is slightly lower ($93% of bulk density). A $10% of thickness variation in top cladding layer along with marginal change in layer density deteriorate field enhancement in TE 0 mode by more than three times. Effect of thickness and density variation on waveguide (Ru [7 nm]/C [18 nm]/Ru [20 nm]) performance is discussed.

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Section: X-ray Reflectivity (Xrr) Is a Well-established Technique For Surfacementioning

confidence: 99%

Surface and interface characterization of Ru/C/Ru trilayer structure using grazing incidence X‐ray reflectivity and X‐ray fluorescence

Kiranjot

Dhawan

Modi

2021

Surface & Interface Analysis

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“…The combination of different in-situ and ex-situ characterization methods with SE is very popular. Recently, in an Auger electron spectroscopy study the complementarity of both methods was analyzed 28 . Besides determination of the optical properties 14,15,23,29 , frequently in SiGe alloys 6,11,12 , used in optics or optoelectronics, optical methods are also capable of indirectly determining material properties, such as the crystallinity 19 , disorder 30 or crystal size 7 .…”

Section: Introductionmentioning

confidence: 99%

In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions

Lohner¹,

Németh²,

Zolnai³

et al. 2020

Preprint

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Ion implantation has been a key technology in microelectronics and generally, for the controlled surface modification of materials for tribology, biocompatibility, corrosion resistance and many more. In this work in-situ spectroscopic ellipsometry was used for accurately tracking and on-line evaluating the accumulation of voids and damage in crystalline Ge during implantation of 200-keV Sb+ ions at a total fluence of 1016 cm− 2 using an ion flux of 2.1 × 1012 cm− 2s− 1. The phases of damage accumulation were identified using unique optical multi-layer models describing the layer structure and composition. The formation of initial partial disorder was followed by complete amorphization and void formation occurring at the fluence of 1 × 1015 cm− 2, reaching a high volume fraction of voids and a layer thickness of ≈ 200 nm by the end of the process. This agrees with numerical simulations and results of complementary measurements including ion beam analysis and electron microscopy. The developed in-situ method for controlling the dynamics of structural damage accumulation is a versatile ion-implantation tool for avoiding adverse void formation and for controlled evolution of subsurface nanocavities or cellular surface texture alike.

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Design and production of tungsten-carbide rich coating layers

Racz

Fogarassy

Kentsch

et al. 2022

Applied Surface Science

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Complementary physicochemical analysis by ellipsometry and Auger spectroscopy of nano-sized protective coating layers

Cited by 4 publications

References 37 publications

Surface and interface characterization of Ru/C/Ru trilayer structure using grazing incidence X‐ray reflectivity and X‐ray fluorescence

Surface and interface characterization of Ru/C/Ru trilayer structure using grazing incidence X‐ray reflectivity and X‐ray fluorescence

In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions

Design and production of tungsten-carbide rich coating layers

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