2017
DOI: 10.1088/1742-6596/897/1/012019
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Complete Fabrication of a Traversable 3 µm Thick NbN Film Superconducting Coil with Cu plated layer of 42m in Length in a Spiral Three-Storied Trench Engraved in a Si Wafer of 76.2 mm in Diameter Formed by MEMS Technology for a Compact SMES with High Energy Storage Volume Density

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Cited by 9 publications
(6 citation statements)
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“…The measurement of the current-voltage characteristics in cryogenic temperatures together with the measurement of magnetic field by a gauss meter showed an energy storage of 0.01 mJ [20]. Increasing the NbN thickness by mitigating the film stress [23], the stored energy increased up to 0.1 mJ [24]. Here, the experimentally obtained j c of NbN-1100 A/mm 2 -was used [19].…”
Section: Experimental Proof Of Concept Using Superconducting Nbn Thin Filmsmentioning
confidence: 79%
See 1 more Smart Citation
“…The measurement of the current-voltage characteristics in cryogenic temperatures together with the measurement of magnetic field by a gauss meter showed an energy storage of 0.01 mJ [20]. Increasing the NbN thickness by mitigating the film stress [23], the stored energy increased up to 0.1 mJ [24]. Here, the experimentally obtained j c of NbN-1100 A/mm 2 -was used [19].…”
Section: Experimental Proof Of Concept Using Superconducting Nbn Thin Filmsmentioning
confidence: 79%
“…Here, the experimentally obtained j c of NbN-1100 A/mm 2 -was used [19]. The largest S near the central axis of the coil unit, S max , estimated from the magnetic flux density B along the central axis of a single-layer solenoid was 0.11 GPa, which was well below σ Si /3 [20,24].…”
Section: Experimental Proof Of Concept Using Superconducting Nbn Thin Filmsmentioning
confidence: 99%
“…Если образцы первого типа используются обычно в качестве детекторов [1,2], и уменьшение размеров здесь напрямую связано с увеличением чувствительности, то вторая группа часто применяется в сильноточной технике, где и необходимо учитывать нагревание токонесущих элементов. Применение широких и относительно толстых пленок возможно в сверхпроводящих магнитах и накопителях энергии, которые исследуются сейчас в качестве альтернативы аккумуляторам [3][4][5].…”
Section: Introductionunclassified
“…Тонкие плёнки из NbN используются в качестве однофотонных детекторов (superconducting single-photon detectors, SSPDs) [2]. Широкие и относительно толстые плёнки используются в сверхпроводящих магнитах и накопителях энергии [3].…”
Section: Introductionunclassified