Compliant Tactile Sensors for High-Aspect-Ratio Form Metrology

Peiner, Erwin

doi:10.5772/6633

Cited by 4 publications

(3 citation statements)

References 35 publications

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“…Fuel injector nozzle comprising spray holes of 170 to 110 μm in diameter was characterized at different scanning speeds and probing force. Thus, results of that work proved the potential of the novel sensor for in-process metrology during the manufacturing of injector nozzles [41,42]. The tactile sensor has been realized as an extremely slender silicon cantilever integrated with probing tip.…”

Section: Roughness Measurement Technique a Profilometer Technique Wamentioning

confidence: 66%

Advanced Nanomeasuring Techniques for Surface Characterization

Ali

2012

ISRN Optics

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Advanced precise and accurate nanomeasurement techniques play an important role to improve the function and quality of surface characterization. There are two basic approaches, the hard measuring techniques and the soft computing measuring techniques. The advanced soft measuring techniques include coordinate measuring machines, roundness testing facilities, surface roughness, interferometric methods, confocal optical microscopy, scanning probe microscopy, and computed tomography at the level of nanometer scale. On the other hand, a new technical committee in ISO is established to address characterization issues posed by the areal surface texture and measurement methods. This paper reviews the major advanced soft metrology techniques obtained by optical, tactile, and other means using instruments, classification schemes of them, and their applications in the engineering surfaces. Furthermore, future trends under development in this area are presented and discussed to display proposed solutions for the important issues that need to be addressed scientifically.

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Section: Roughness Measurement Technique a Profilometer Technique Wamentioning

confidence: 66%

Advanced Nanomeasuring Techniques for Surface Characterization

Ali

2012

ISRN Optics

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“…A more comprehensive analytical treatment of the sensor function was reported elsewhere (Peiner 2008c). …”

Section: Theoreticalmentioning

confidence: 99%

MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes

Peiner

Doering

2009

Microsyst Technol

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Tactile metrology with deep and narrow micro holes was addressed using extremely slender piezoresistive micro cantilever sensors. Linear strain-displacement characteristics were observed with this sensor operated under transversal and axial loading. From noise, non-linearity and repeatability measurements the resolution and uncertainty of the cantilever sensors were determined to few nm and few tens of nm, respectively, within a micron displacement span. Under axial loading buckling of the cantilevers was observed after exceeding the critical limit of an Euler beam under the boundary conditions of a clamped-pinned beam. The cantilevers typically survived displacements well above the buckling limit, i.e., fracture of 3-mm long cantilevers was only observed at displacements of more than 200 lm. The feasibility of the cantilever as an active 1D touch probe for high-aspect-ratio blind holes was demonstrated at a dry-etched silicon highaspect-ratio microstructure. As an application example with a high-volume product we investigated the form and roughness of diesel injector nozzle spray holes.

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“…We developed measuring method for shape and dimension of microcomponents which has axial composition like CMM and uses tunneling current for sensing the proximity of the sample and the probe [1]. Erwin Peiner reported the measurement of the surface roughness of the inside of the injector nozzles with a vertical scanning AFM [2]. This report shows many measuring methods with a cantilever which has multiple-probe, and SPM technologies have successfully used to micro-components evaluation.…”

Section: Introductionmentioning

confidence: 99%