The energy harvesters used in self-powered wireless sensing technology, which has the potential to completely solve the power supply problem of the sensing nodes from the source, usually require mechanical movement or operate in harsh environments, resulting in a significant reduction in device lifespan and reliability. Therefore, the influencing factors and failure mechanisms of the operating status of self-powered wireless sensors were analyzed, and an innovative evaluation index system was proposed, which includes 4 primary indexes and 13 secondary indexes, including energy harvesters, energy management circuits, wireless communication units, and sensors. Next, the weights obtained from the subjective analytic hierarchy process (AHP) and objective CRITIC weight method were fused to obtain the weights of each index. A self-powered sensor evaluation scheme (FE-SPS) based on fuzzy comprehensive evaluation was implemented by constructing a fuzzy evaluation model. The advantage of this scheme is that it can determine the current health status of the system based on its output characteristics. Finally, taking vibration energy as an example, the operational status of the self-powered wireless sensors after 200 h of operation was comprehensively evaluated. The experimental results show that the test self-powered wireless sensor had the highest score of “normal”, which is 0.4847, so the evaluation result was “normal”. In this article, a reliability evaluation strategy for self-powered wireless sensor was constructed to ensure the reliable operation of self-powered wireless sensors.