Composite surfactant based on AEO and ADS for colloidal silica particles removal in post CMP cleaning of copper interconnection

Yang, Lei; Yin, Da; Zhang, Wenqian; Han, Tiecheng; Zhao, Peng; Wang, Tongju; Lu, Cheng

doi:10.1016/j.mssp.2023.107620

Cited by 3 publications

(2 citation statements)

References 36 publications

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“…This study employs the non-ionic surfactant AEO polyether structure to physically adsorb onto the surface of nano-SiO 2 , effectively decreasing the hydrophilicity of SiO 2 . 39 Numerous scholars have investigated the combined effect of nano-SiO 2 and surfactants, focusing on the controllability of the SiO 2 particle size during synthesis. However, there is a lack of in-depth research on how different synthetic particle sizes impact oil−water IFT.…”

Section: Introductionmentioning

confidence: 99%

“…The findings indicated that the addition of nano-SiO 2 caused sodium dodecyl sulfate (SDS), zwitterionic surfactant dodecyl dimethyl carboxyl betaine (BS-12), and nano-SiO 2 particles to exhibit mutual exclusion in interface morphology, whereas cationic surfactant hexadecyltrimethylammonium bromide (CTAB), AEO, and nano-SiO 2 particles displayed mutual attraction. This study employs the non-ionic surfactant AEO polyether structure to physically adsorb onto the surface of nano-SiO 2 , effectively decreasing the hydrophilicity of SiO 2 . Numerous scholars have investigated the combined effect of nano-SiO 2 and surfactants, focusing on the controllability of the SiO 2 particle size during synthesis.…”

Section: Introductionmentioning

confidence: 99%

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Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Cheng,

Yang,

Yan

et al. 2024

Energy Fuels

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Nanofluids, as a novel material for tertiary oil recovery, have shown promising potential in enhancing water flooding efficiency in low-permeability reservoirs and increasing oil recovery rates. However, the risk of particle agglomeration arises when the particle size is too small. Challenges such as maintaining dispersion stability, efficient long-distance transportation of nanofluids, and preventing particle retention and agglomeration have emerged as key obstacles hindering the widespread adoption and large-scale implementation of nanoflooding technology in enhancing oil recovery in various reservoir conditions. With issues such as poor nanoparticle dispersion stability, costly reprocessing, and limited reservoir fluid compatibility addressed, nano-SiO 2 particles with average sizes of 45, 170, and 625 nm were synthesized using an enhanced particle size control technique based on the Stober method. The impact of these different particle sizes on dispersion, emulsion stability, oil−water interfacial tension (IFT), and viscosity reduction before and after modification with fatty alcohol polyoxyethylene ether (AEO) were investigated. The findings demonstrate that modified nano-SiO 2 exhibits enhanced stability and reduced oil−water IFT. At a primary AEO concentration of 0.25 wt %, micellar structure formation synergizes with SiO 2 to achieve optimal IFT reduction. Smaller SiO 2 particle sizes are more amenable to surface modification and exhibit superior adsorption capacity at the oil−water interface compared to larger particles, facilitating the interaction with asphaltene aggregates and, thereby, enhancing crude oil flowability. In a study, 170 nm nanosized SiO 2 demonstrated a substantial viscosity reduction effect, with an apparent viscosity reduction rate of 95.3% at 0.0025 wt % SiO 2 + 0.25 wt % AEO under test conditions of 45 °C and 5 s −1 , indicating a significant viscosity reduction effect. This research introduces a novel concept for designing nanofluids to repel oil in low-permeability tight oil reservoirs, establishing an oil repulsion system. These findings not only advance the theoretical understanding of enhanced recovery in such reservoirs but also contribute to the efficient development of conventional and unconventional oil and gas fields, including deep shale gas and ultraheavy and thick oil reservoirs.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Cheng,

Yang,

Yan

et al. 2024

Energy Fuels

View full text Add to dashboard Cite

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Mechanisms of multiple functional groups in post-CMP cleaning solutions for Co interconnects

Zhang,

Yan,

2025

Colloids and Surfaces A: Physicochemical and Engineering Aspect

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Study on the polishing performance and mechanism of sapphire wafers by different types of degradable surfactants

Xu,

Peng,

Wang

et al. 2024

Surfaces and Interfaces

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Composite surfactant based on AEO and ADS for colloidal silica particles removal in post CMP cleaning of copper interconnection

Cited by 3 publications

References 36 publications

Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Mechanisms of multiple functional groups in post-CMP cleaning solutions for Co interconnects

Study on the polishing performance and mechanism of sapphire wafers by different types of degradable surfactants

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Composite surfactant based on AEO and ADS for colloidal silica particles removal in post CMP cleaning of copper interconnection

Cited by 3 publications

References 36 publications

Impact of the Nano-SiO2 Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Impact of the Nano-SiO2 Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Mechanisms of multiple functional groups in post-CMP cleaning solutions for Co interconnects

Study on the polishing performance and mechanism of sapphire wafers by different types of degradable surfactants

Contact Info

Product

Resources

About

Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction

Impact of the Nano-SiO₂ Particle Size on Oil Recovery Dynamics: Stability, Interfacial Tension, and Viscosity Reduction