Composition and structure of NiTiCu shape memory thin films

Abstract

Preliminary results on NiTiCu shape memory alloy thin-film deposition on silicon are reported. Characteristics of these films (composition, density and electrical resistivity) were correlated with working gas pressure and rf power during sputtering. The films were then annealed in order to crystallize them. The properties of these films were examined as functions of annealing and measurement temperatures in order to evidence shape memory behaviour.

Mechanical Properties of NiTi-Based Foam with High Porosity for Implant Applications

“…where q is the measured density of NiTiCu foam and q B is the density of bulk NiTiCu, 6.5 g/cm 3 [21]. A Skyscan1172 X-ray l-CT scanner was used to perform combined cyclic compression testing and 3D X-ray tomography.…”

“…Sehitoglu et al [18,19] and Biscarini et al [20] investigated the mechanical properties of NiTiCu single crystal SMAs under compression loading, and reported that the slip resistance increases when Ni-rich precipitates are present. To date, the mechanical behavior of bulk NiTiCu SMA is well established [7,[14][15][16][17][18][19][21][22][23][24]; however, few studies have focused on the effect of porosity on NiTiCu SMAs [25][26][27][28]. Goryczka et al [26,27] examined powder processing methods for producing homogenous NiTiCu SMAs.…”

Characterization of Sputtered Nickel-Titanium (NiTi) Stress and Thermally Actuated Cantilever Bimorphs Based on NiTi Shape Memory Alloy (SMA)

“…8 However, it has been well established that sputter deposition is the most practical technique for depositing NiTi with sufficient shape memory effect. 6,[9][10][11][12][13][14][15] Sputtering is the best option for depositing NiTi thin films because the conventional vacuum evaporation of NiTi leads to the potential problem of difference in evaporation rate due to difference in vapor pressure, thus making composition control more difficult. 1 One of the techniques used for sputtering NiTi onto silicon (Si) wafers is simultaneous cosputtering from a Ni50Ti50 alloy and pure Ti targets.…”

Pulsed laser deposition of the NiTiCu thin film alloy

“…The most important property is the resistance at high mechanical stress so these alloys are deformable and they are also biocompatibile [1][2][3][4]. In last years many papers have been written about these alloys, but little has been dedicated to thin films alloys.…”