2006
DOI: 10.1016/j.jcrysgro.2005.12.004
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Compositional and structural characterization of indium nitride using swift ions

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Cited by 9 publications
(5 citation statements)
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“…We suggest that the nitrogen split interstitial could be the defect which results in the N-N bonding as measured by the UV-Raman system, 21 N 2 dimer 23 or interstitial N atoms or molecules. 44 The calculated formation energy for the nitrogen antisite, which could also be described as the complex ͑V In + N split interstitial͒ and the defect complex V N +N In in n-type material, is too high for it to occur in appreciate concentrations in thermal equilibrium under either N-rich or In-rich conditions. The In-vacancy clusters could exist under N-rich condition, giving rise to nitrogenmolecular-like bonding configurations.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…We suggest that the nitrogen split interstitial could be the defect which results in the N-N bonding as measured by the UV-Raman system, 21 N 2 dimer 23 or interstitial N atoms or molecules. 44 The calculated formation energy for the nitrogen antisite, which could also be described as the complex ͑V In + N split interstitial͒ and the defect complex V N +N In in n-type material, is too high for it to occur in appreciate concentrations in thermal equilibrium under either N-rich or In-rich conditions. The In-vacancy clusters could exist under N-rich condition, giving rise to nitrogenmolecular-like bonding configurations.…”
Section: Discussionmentioning
confidence: 99%
“…21 Other possibilities, however, such as molecular nitrogen or di-nitrogen interstitials cannot be excluded. Using swift ions, Timmers et al 44 suggested that InN contains N atoms or molecules interstitially. Under N-rich conditions, the formation of In vacancies, N 2 , and the antisite N In have been reported; and under In-rich conditions, the formation of N vacancies and In N have been observed by energydispersive x-ray analysis for InN films grown at 300-550°C.…”
Section: Discussionmentioning
confidence: 99%
“…2(a) indicates the unknown peak of the impurity phases, which may arise from the zinc-blende InN, InN (10-11) or elemental indium. 31,34,35 The volume fraction of the impurity phase, estimated as I im I InN:Mg , is around 5 %, where I im is the intensity of the unknown peak and I I n N :M g is the intensity of the InN:Mg (0002) peak. The calculated c-lattice parameter of the InN film is 5.725 Å that of the Mg-doped InN film is 5.718 Å. Xie et al have shown that increasing the Mg concentration from 10 18 cm −3 to 10 21 cm −3 reduced the c-lattice parameters by 0.02 Å and increased the a-lattice parameters by 0.02 Å by the strain generated during growth process.…”
Section: Resultsmentioning
confidence: 99%
“…Keeping in mind the pitfalls of many standard chemical analysis techniques when applied to InN (see the review by Butcher and Tansley 23 ) we applied a stoichiometry analysis technique whose methodology has been developed specifically for accurate In:N determination, that is elastic recoil detection (ERD) analysis. 6,8,11 Figure 1 the N/In ratios, reported previously in reference, 10 which were measured for the films as a function of film growth temperature. As shown in the plot the N/In ratio is very high for the film growth temperature of 200 C but drops steadily to only slightly nitrogen rich stoichiometry at film growth temperatures of 400 C and greater.…”
mentioning
confidence: 83%
“…2,3 However, as early as 2002 (Ref. 4) and more widely afterward, [5][6][7][8][9][10][11][12][13] we published work on the observation of surprisingly large amounts of excess nitrogen measured in InN grown by RF sputtering, remote plasma enhanced chemical vapour deposition (RPECVD), and to a lesser extent, in some thin plasma assisted molecular-beam epitaxy (PA-MBE) grown samples. In some extreme cases, for films grown at low temperatures, we measured N/In ratios as high as 1.7.…”
mentioning
confidence: 99%