This study presents a technique for measuring the centering error of a
lens. The technique uses power analysis and is highly accurate. The
module is designed by a prism that is patterned using a subwavelength
grating combined with a reflection-centering system by using the −1st-order rays at 5 mW and 650 nm. The
optical axis error is tested and analyzed by the powermeter by using
Snell’s law and diffractive characteristics. The resolution of the
optical-centering error in the system is amplified by a factor of 4
compared with the centering error measuring system based on
autocollimation. The technique proposed in this study improves the
sensitivity of the instrument and reduces the requirements of the
sensor at the end side based on the direction or energy variation of
the light.