2022
DOI: 10.1007/s00542-022-05392-8
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Comprehensive review of low pull-in voltage RF NEMS switches

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Cited by 8 publications
(4 citation statements)
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“…It utilizes a geometric shape that can be adjusted in three-dimensional space, achieving a lower driving voltage and enhanced RF performance, surpassing conventional flat cantilever switches. However, compared to existing designs [20,70], the downside of this topology is the longer switching time, likely due to its relatively greater length.…”
Section: Ohmic Rf Mems Switchesmentioning
confidence: 99%
See 2 more Smart Citations
“…It utilizes a geometric shape that can be adjusted in three-dimensional space, achieving a lower driving voltage and enhanced RF performance, surpassing conventional flat cantilever switches. However, compared to existing designs [20,70], the downside of this topology is the longer switching time, likely due to its relatively greater length.…”
Section: Ohmic Rf Mems Switchesmentioning
confidence: 99%
“…The manufactured switch achieves lower driving voltage with fewer manufacturing steps, as shown in Figure 3a. Traditional MEMS switches require a trade-off between RF performance and driving voltage [20]. Enhancing RF performance, such as by increasing the air gap to reduce insertion loss [69], typically results in an increase in driving voltage.…”
Section: Ohmic Rf Mems Switchesmentioning
confidence: 99%
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“…They are of great significance for achieving self-control, improving automation and intelligence levels, and enhancing system reliability and balance. Nano-switches are also an important component of the design of next-generation information storage, exchange, and logic circuits [1]. A nano-switch consists of a movable electrode and a fixed electrode.…”
Section: Introductionmentioning
confidence: 99%