2006
DOI: 10.1116/1.2178362
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Computational fluid dynamic model of a tapered Holweck vacuum pump operating in the viscous and transition regimes. I. Vacuum performance

Abstract: Holweck molecular drag pumps are used as high-pressure stages in hybrid turbomolecular vacuum pumps, where they can operate in the transition and the viscous regime. In this article we develop a Navier-Stokes model of a Holweck pump with tapered pumping channels, applying slip-flow boundary conditions, to predict vacuum performances with and without gas flow. The commercial computational fluid dynamic code FLUENT is used to solve the model equations and to predict the pressure profile along the grooves. A spec… Show more

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Cited by 15 publications
(6 citation statements)
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References 12 publications
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“…Cheng and Chiang 6 used fluid dynamics method to estimate the pumping performance of a turbobooster vacuum pump, with spiral-grooved rotor and inner housing. Giors et al 7 developed a Navier-Stokes model of a Holweck pump with tapered pumping, and used FLUENT to predict the pressure profile along the grooves. Rabiger et al 8 utilized a finite volume model to analyze the distributions of velocity, pressure, and temperature of the twin-screw pump clearances.…”
Section: Introductionmentioning
confidence: 99%
“…Cheng and Chiang 6 used fluid dynamics method to estimate the pumping performance of a turbobooster vacuum pump, with spiral-grooved rotor and inner housing. Giors et al 7 developed a Navier-Stokes model of a Holweck pump with tapered pumping, and used FLUENT to predict the pressure profile along the grooves. Rabiger et al 8 utilized a finite volume model to analyze the distributions of velocity, pressure, and temperature of the twin-screw pump clearances.…”
Section: Introductionmentioning
confidence: 99%
“…В работе [9] авторы продолжили свои исследования, применив их к молекулярному насосу Хольвека с каналами, уменьшающимися по длине, начиная с всасывания и заканчивая нагнетанием. При разработке математической модели использовались основные допущения и зависимости, приведенные в работе [8].…”
unclassified
“…Расчет математических моделей также осуществляется в коммерческом пакете гидрогазодинамики CFD FLUENT. В работах [8,9] подчеркивается возможность использования уравнений Навье -Стокса с граничными условиями скольжения газа для исследуемого МВН, причем данное решение противопоставляется выводам о неприменимости такого подхода к решению задачи в работе [10].…”
unclassified
“…The detailed modeling of vacuum pumps [14,37,122] and gas separators [131] is also very important to obtain the maximum eciency. Multilayer insulation (MLI) and blankets, extensively used in numerous applications, consist of several layers of thin sheets with vacuum conditions between them to ensure that heat is transferred only through radiation.…”
Section: Methodsmentioning
confidence: 99%