Computational fluid dynamic modeling of tin oxide deposition in an impinging chemical vapor deposition reactor

Li, Mingheng; Sopko, John F.; McCamy, James W.

doi:10.1016/j.tsf.2006.03.052

Cited by 22 publications

(11 citation statements)

References 18 publications

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“…In short, the deposition profile changes from M shape with two maximum layer thicknesses, each one side of the gas inlet, to A shape with one maximum underneath the gas inlet. Such changes in shape of the deposition profile cannot be explained by layer formation directly from the source gasses, in contrast to the more widely described the case of SnO 2 deposition where a more or less peak shaped deposition profile is observed [25]. However, the shift of deposition maxima towards the gas inlet with temperature can be explained by a mechanism in which an intermediate product is formed first, where-after it reacts further on the surface, thereby depositing the ZnO layer.…”

Section: Resultsmentioning

confidence: 59%

“…In order to design an effective reactor for ZnO deposition, more accurate information on the mechanism was needed. Moreover, it was previously demonstrated that modeling can be a powerful tool for understanding what actually happens inside a reactor [25]. For the APCVD process of SnO 2 deposition, a good modeling fit was obtained with a surface reaction between the oxidizing agent and the precursor [26].…”

Section: Introductionmentioning

confidence: 99%

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APCVD of ZnO:Al, insight and control by modeling

Deelen¹,

Illiberi²,

Kniknie³

et al. 2013

Surface and Coatings Technology

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Atmospheric pressure chemical vapor deposition (APCVD) of ZnO from diethyl zinc (DEZn) and t-butanol was performed using an industrial reactor design. Deposition profiles were recorded to gain insight in the position dependent variations in layer thickness in such a reactor. We observed that for a deposition temperature below 400°C most of the deposition took place close to the exit of the gasses, while for increasing temperatures the deposition shifts towards the gas inlet. This trend can be explained by the reaction mechanism through an intermediate alkoxide species from DEZn and t-butanol, which in turn leads to ZnO deposition through a surface reaction. The deposition profile is dependent on the local alkoxide concentration. With increasing temperature, the formation rate increases. This translates in an earlier formation, i.e. in a shift upstream towards gas inlet because this alkoxide formation takes place during the transport through the reactor. Chemical vapor deposition (CVD) is a highly complex system with many interacting physical and chemical processes. Modeling was used to gain insight on the local variations of the concentration of reactive species inside a reactor and was shown to predict the deposition profiles. Moreover, the impact of changes in reactor design on the deposition is discussed.

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Section: Resultsmentioning

confidence: 59%

Section: Introductionmentioning

confidence: 99%

APCVD of ZnO:Al, insight and control by modeling

Deelen¹,

Illiberi²,

Kniknie³

et al. 2013

Surface and Coatings Technology

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“…The initial motivations of these studies are to predict the convective heat and mass transfer in related applications, [7][8][9][10][11] such as electronics packing, 12 chemical vapour deposition reactor, 13 cell adhesion measurements, 14,15 and industry clearing processes. 16 Moreover, there are some other applications, such as circular aerostatic thrust bearings, 17 polymer processing, 18 and flames in microcombustors. 19 In previous studies, much research attention was paid on the effects of inlet nozzle Reynolds number (Re) and aspect ratios of discs distance-to-nozzle radius (e = h/R in ) on the vortices structures in the flow field, [20][21][22][23] which affect the radial flow behaviours and applications significantly.…”

Section: Introductionmentioning

confidence: 99%

Vortices evolution in round pockets of modern machine tools

Shen

Yan

Zhao

et al. 2019

Lubrication Science

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Vortices evolutions in oil pockets of machine tools were investigated by using a particle image velocimetry (PIV) system and numerical simulations. The influences of Reynolds number (Re), aspect ratio of pocket depth‐to‐nozzle radius (e), and clearance height (h) on the vortices characteristics were studied. Up to three interacting vortices appear, namely, the primary vortex, the secondary vortex, and the tertiary vortex. The vortices evolve in a complex manner. The primary vortex appears at 15 < Re < 1610 and dominates the whole pocket flow at relatively high Re. The secondary vortex appears at Re > 210. The vortices size increases with e increasing. Moreover, the vortices detachment and reattachment positions were also been investigated. The vortices structures have significant influences on the distributions of pressures and wall shear stresses on the upper disc. The results further the understanding of vortices evolutions in oil pockets and will guide engineering applications related to the round pocket flow.

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“…However, they are not many papers dealing with the characterization of the shear stress distribution at the lower wall of the RFC (Fryer et al, 1985;DiMilla, 1997, 1998;Jensen and Friis, 2004;Moller, 1963) as many of them are concerned with heat transfer or mass transfer applications (e.g. use of impinging jets as coolant, CVD deposition) (Li et al, 2006;Park et al, 2003).…”

Section: Introductionmentioning

confidence: 99%