“…The presence of high sheet charge density and mobility increases the sensitivity [3]. Various research has been done on HEMT based biosensor for pH detection [4] [5][6] [7], Immuno-detection using floating gate AlGaN HEMT [8],deoxyribonucleic acid (DNA) [9], Urea testing [10], Prostate-specific antigen testing [11] [12], Monokine induced by interferon gamma [13], CerbB2 detection [14], CO and H 2 detection [3] [15], C-reactive protein detection [16], troponin I testing [17] [18] and carcinoembryonic antigen (CEA) detection respectively. To enhance the sensitivity of the proposed HEMTs device, various structures are also optimized like Circular gate HEMT, Double gate, Gateless devices, Nano-cavity under the gate region towards the drain side, and Nano-cavity at the source and drain both sides, respectively.…”