Computational investigation of a novel metal thickness measurement system with coaxial triple-coil sensor for chemical mechanical polishing

Wang, Chengxin; Tian, Fangxin; Wang, Tongqing; Liu, Bangxu; Lu, Xinchun

doi:10.1007/s00170-024-13677-7

Int J Adv Manuf Technol

2024

DOI: 10.1007/s00170-024-13677-7

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Computational investigation of a novel metal thickness measurement system with coaxial triple-coil sensor for chemical mechanical polishing

Chengxin Wang,

Fangxin Tian,

Tongqing Wang

et al.

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Unconventional coil shape design of eddy current sensors and the effect of shape parameters on the micro/nano-scale metal film thickness measurement performance

Li,

Lu,

Wang

et al. 2024

Meas. Sci. Technol.

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The thickness of metal film is a critical parameter, especially in micro/nano-manufacturing, where high-precision measurement is essential. The eddy current method, a non-destructive testing technique, is well-suited for in-situ measurement of micro/nano-scale metal film thickness due to its superior performance. However, enhancing the measurement capabilities of eddy current sensors remains a significant challenge. In practical applications, thickness sensitivity and spatial resolution are two key performance indicators of eddy current sensors, and improving both simultaneously is difficult. While the sensitive element (coil) of an eddy current sensor has a substantial impact on thickness sensitivity, its effect on spatial resolution has received less attention.This study establishes an eddy current coil model based on electromagnetic field theory, defining both thickness sensitivity and spatial resolution in the context of micro/nano-scale metal film thickness measurement. Two unconventional coil shapes are introduced, contrasting with the traditional cylindrical design, to investigate the influence of coil shape parameters, specifically the spatial distribution of the coil turns, on the key performance indicators. Simulation results are corroborated through experimental validation. Based on a series of calculations and analyses, an optimization method for coil shape parameters is proposed using a defined comparison factor that balances both thickness sensitivity and spatial resolution, which offers a promising approach for improving coil shape design.

show abstract

Unconventional coil shape design of eddy current sensors and the effect of shape parameters on the micro/nano-scale metal film thickness measurement performance

Li,

Lu,

Wang

et al. 2024

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

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Computational investigation of a novel metal thickness measurement system with coaxial triple-coil sensor for chemical mechanical polishing

Cited by 1 publication

References 22 publications

Unconventional coil shape design of eddy current sensors and the effect of shape parameters on the micro/nano-scale metal film thickness measurement performance

Unconventional coil shape design of eddy current sensors and the effect of shape parameters on the micro/nano-scale metal film thickness measurement performance

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