<p>Complex oxide systems with hierarchical order are of
critical importance in material science and catalysis. Despite their immense
potential, their design and synthesis are rather difficult. In this study we
demonstrate how the deposition of small oligomeric (MoO<sub>3</sub>)<sub>1-6</sub> clusters,
which can be formed by the sublimation of MoO<sub>3</sub> powders,
leads to the formation of locally ordered layers of (MoO<sub>3</sub>)<sub>1</sub> monomers
on anatase TiO<sub>2</sub>(101). Using both high-resolution imaging and
theoretical calculations, we show that at room temperature, such oligomers
undergo spontaneous dissociation to their monomeric units. In initial stages of
the deposition, this is reflected by the observation of one to six
neighboring (MoO<sub>3</sub>)<sub>1</sub> monomers that parallel the size
distribution of the oligomers. A transient mobility of such oligomers on both
bare TiO<sub>2</sub>(101) and (MoO<sub>3</sub>)<sub>1</sub> covered
areas is key to the formation of a complete layer with a saturation coverage of
one (MoO<sub>3</sub>)<sub>1</sub> per two undercoordinated surface Ti
sites. We further show that such layers are stable to 500 K, making them highly
suitable for a broad range of applications. </p>