The detection and analysis of SF 6 decomposition components are of great significance in online condition assessment and fault diagnosis of GIS. Considering the shortcomings of general detection methods, carbon nanotubes (CNTs) gas sensor was studied to detect the SF 6 decomposition components because of its advantages in large surface activity and abundant pore structure, et al. The large surface area has a strong adsorption and desorption capacity. In this chapter, SF 6 decomposed gases, namely SO 2 F 2 , SOF 2 , SO 2 , H 2 S and CF 4 are chosen as probe gases because they are the main by-products in the decomposition of SF 6 under partial density (PD). First, the properties and preparation methods of CNTs are introduced to verify the advantages of CNTs for SF 6 decomposition components detection. Then, both theoretical calculation and sensing experiment were adopted to study the microadsorption mechanism and macrogas-sensing properties. Based on the intrinsic CNTs, study for SF 6 decomposition components adsorption, Pd, Ni, Al, Pt and Au metal doping CNTs and plasma-modified CNTs are discussed in order to enhance the gas sensing and selectivity of CNTs.