Metallic channel transistors have been proposed as the candidate for sub-10 nm technology node. However, the conductivity modulation in metallic channels can only be observed at low temperatures usually below 100 K. In this study, room-temperature field effect and modulation of the channel resistance was achieved in the metallic channel transistors, in which the oxygen-doped TiN ultrathinbody channels were prepared by the atomic layer delta doping and deposition (AL3D) with precise control of the channel thickness and electron concentration. The decrease of channel thickness leads to the reduction in electron concentration and the blue shift of absorption spectrum, which can be explained by the onset of quantum confinement effect. The increase of oxygen incorporation results in the increase of interband gap energy, also giving rise to the decrease in electron concentration and the blue shift of absorption spectrum. Because of the significant decrease in electron concentration, the screening effect was greatly suppressed in the metallic channel. Therefore, the channel modulation by the gate electric field was achieved at room temperature due to the quantum confinement and suppressed screening effect with the thickness down to 4.8 nm and the oxygen content up to 35% in the oxygen-doped TiN ultrathin-body channel.With the rapid evolution of semiconductor technology down to the sub-10 nm technology node, nanoscale transistors based on new structures and materials have been explored [1][2][3][4][5][6][7][8][9][10][11] . One of the possible candidates for sub-10 nm devices is the junctionless transistors (JLTs), in which an ultrathin semiconductor body with a single doping type in the source, channel, and drain has been proposed 2, 12-15 . A JLT can be regarded as a "gated-resistor" with the absence of PN junctions in the source and drain regions. A gate voltage is applied to control the current by the formation of a depletion region in channel. Because of the absence of PN junctions in JLTs, the ultrafast thermal annealing for the dopant activation in source and drain is not needed, which allows one to fabricate the transistors with smaller channel lengths. Moreover, the presence of PN junctions in metal-oxide-semiconductor field effect transistors (MOSFETs) causes the extension of source/drain depletion charges into the channel, giving rise to severe short-channel effects including the drain-induced barrier lowering and degraded subthreshold slope 2 . Hence the severe short-channel effects can be alleviated in JLTs [15][16][17] . In addition, in the OFF state of JLTs, the effective distance between source and drain is longer than the physical gate length due to the extension of the channel depletion into source and drain, which suppresses the short channel effects in JLTs 17,18 . Accordingly, the junctionless structure provides the solution to overcome the difficulties related to aggressive scaling of MOSFETs. Actually, the JLT with a channel length down to 3 nm has been demonstrated 19 . In order to achieve a high ...