Despite the importance of self-resonance frequency (SRF) in the operation of inductors, which is only effective below the SRF, a comprehensive analysis of the SRF in different inductor structures has yet to be conducted. This work employs a three-dimensional electromagnetic wave simulation to analyze SRF in the both solenoid and planar inductor structures with various inductor structure parameters such as the number of turns, radius, and inter-coil distance. We summarize the behavior of the SRF with these parameters. This result is valuable for radio-frequency engineering applications.