“…Thus, nucleation should occur in a stochastic fashion such that, after some number of nucleation events, or the thickness of the film, stable phase nucleation should occur . This particular thermodynamic limit is affected by the effective supersaturation, which is related to the number of atoms crystallizing (related to f and E ), temperature, and oxygen pressure (which affect bulk stability). ,− Once a region of the more stable phase nucleates, e.g., 4H in BSMO, the probability of its nucleation in that region immediately becomes preferred (possibly absolute), due to both its inherent bulk stability and its local epitaxial stability upon the preexisting stable phase deposit. − , From that thickness onward, the local probabilities of nucleation vary with respect to location depending on the structure of the pre-existing film in the local area, and ultimately the film will convert completely to the stable (4H) phase with increased thickness, with some thickness range of mixed phase. That 40 nm films can be fabricated using iPLD indicates that any single-phase thickness value in rPLD is likely related to a thickness-dependent change in local nucleation probabilities, in a manner that decreases the preference for the epitaxially stabilized metastable phase. − …”