A novel uni-traveling-carrier photodetector (UTC-PD) structure with an integrated focusingreflection (FR) mirror realized by a non-periodic concentric circular high-contrast grating (NP-CC-HCG), referred to as FR-UTC-PD, is proposed to enhance responsivity in conventional UTC-PDs. The FR-UTC-PD allows improving the responsivity by 36.5% at a 1.55-μm wavelength as compared to a UTC-PD without integrated an FR mirror with 84.59% reflectivity. For 40-μm-diameter PDs, the obtained 3-dB bandwidths are unaltered with values of 18 GHz at -3.0 V bias voltage. The radio-frequency (RF) output power and photocurrent are -1.77 dBm and 17.56 mA, respectively, at 10 GHz and the -6.0 V bias voltage.
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2The high-speed and high-responsivity photodetectors operating at long wavelength regimes have been widely used in wireless communication system, broadband optical communication system, and high-frequency measurement systems. 1-2) The uni-travelingcarrier photodetector (UTC-PD) [3][4] only utilizes electrons as active carriers and thus easily exhibits high-speed and high-output characteristics simultaneously, which has been of great interest both for research [5][6][7][8] and broad ranges of applications. 9-14) Moreover, high-speed UTC-PDs also need high-responsivity to prevent the waveform distortion of the high-speed signals and thus degrade the total power consumption of the system. Therefore, it is very important to adopt methods to further improve the bandwidth and responsivity performance for UTC-PDs. For instance, a UTC-PD with the downscaling absorber thickness and absorption area starting with 86 nm, 13μm 2 scaled down to 30 nm, 5 μm 2 , achieves 3-dB bandwidths from 235 GHz to 310 GHz while having the responsivities from 0.126 A/W to 0.07 A/W, respectively, at a 1.55-μm wavelength. [5][6] In order to achieve higher responsivity, a UTC-PD with a 1.2-μm-thick InGaAs absorber exhibits the responsivity up to 1.0 A/W, with a 3-dB bandwidth of only 9 GHz under low photocurrent. 15) Hence, balancing the tradeoff between the bandwidth and responsivity in UTC-PDs has become an active research area.Recently, various structures have been explored to address the bandwidth-responsivity