Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan, Muhammad Asif; Bao, Jingfu; Bao, Feihong; Zhou, Xin

doi:10.3390/mi10050296

Cited by 13 publications

(9 citation statements)

References 62 publications

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“…Shi et al designed different two-dimensional radial periodic structures to achieve low-frequency band gaps [ 34 ]. The usual design for one-dimensional PCs is to arrange them on the LWR support tether or in a two-dimensional arrangement on the anchor [ 15 , 16 , 19 , 22 , 25 , 26 , 27 , 35 , 36 , 37 , 38 , 39 ]. In the case of one-dimensional PCs, they are often arranged periodically along the x -axis on the support tether [ 16 , 22 , 35 , 36 , 37 , 38 , 39 ].…”

Section: Introductionmentioning

confidence: 99%

“…The usual design for one-dimensional PCs is to arrange them on the LWR support tether or in a two-dimensional arrangement on the anchor [ 15 , 16 , 19 , 22 , 25 , 26 , 27 , 35 , 36 , 37 , 38 , 39 ]. In the case of one-dimensional PCs, they are often arranged periodically along the x -axis on the support tether [ 16 , 22 , 35 , 36 , 37 , 38 , 39 ]. Therefore, one-dimensional PCs can effectively block the propagation of sound waves only by satisfying the directional band gap on the Г-X, but they also require a longer support tether to arrange PCs.…”

Section: Introductionmentioning

confidence: 99%

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H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators

Tong

et al. 2023

Sensors

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In this paper, a novel H-shaped radial phononic crystal (H-RPC) structure is proposed to suppress the anchor loss of a Lamb wave resonator (LWR), which has an ultra-high frequency (UHF) and ultra-wideband gap characteristics. Compared to previous studies on phononic crystal (PC) structures aimed at suppressing anchor loss, the radial phononic crystal (RPC) structure is more suitable for suppressing the anchor loss of the LWR. By using the finite element method, through the research and analysis of the complex energy band and frequency response, it is found that the elastic wave can generate an ultra-wideband gap with a relative bandwidth of up to 80.2% in the UHF range when propagating in the H-RPC structure. Furthermore, the influence of geometric parameters on the ultra-wideband gap is analyzed. Then, the H-RPC structure is introduced into the LWR. Through the analysis of the resonant frequency, it is found that the LWR formed by the H-RPC structure can effectively reduce the vibration energy radiated by the anchor point. The anchor quality factor was increased by 505,560.4% compared with the conventional LWR. In addition, the analysis of the LWR under load shows that the LWR with the H-RPC structure can increase the load quality factor by 249.9% and reduce the insertion loss by 93.1%, while the electromechanical coupling coefficient is less affected.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators

Tong

et al. 2023

Sensors

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“…Based on this, it is urgently necessary to use some effective methods to suppress the anchor loss of the resonators. Presently, researchers have proposed a number of methods to reduce the resonator’s anchor loss [ 6 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ]. For example, the anchor point is placed [ 6 ] at a minor resonator node.…”

Section: Introductionmentioning

confidence: 99%

“…The resonator boundary displacement is almost zero; thus, optimizing the loss of the resonator is designed into the butterfly [ 9 ], the etching stress release hole [ 10 ] on the resonator or the resonator edge to reduce the acoustic energy dissipated through the support beam. Based on the Bragg reflection law, introducing the acoustic mirror [ 12 , 13 ] or the phonon crystal structure [ 14 , 15 , 16 , 17 , 18 , 19 , 20 ] can reflect the acoustic waves propagating from the resonator, thus effectively reducing the anchor loss. In recent years, the continuous development of phonon crystal correlation theory will provide a good idea for many scientists to use phonon crystal to reduce the anchor loss of resonators.…”

Section: Introductionmentioning

confidence: 99%

Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal

Zhu

Liu

et al. 2022

Sensors

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Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of various overtone modes. First, using the finite element method to study the frequency characteristics and delay line of the SCC-PnC band, the SCC-PnC has an ultra-wide bandgap of 56.6–269.6 MHz. Next, the effects of the height h and the position h1 of the structural parameters of the small cross-connected plate on the band gap are studied, and it is found that h is more sensitive to the width of the band gap. Further, the SCC-PnC was implanted into the piezoelectric MEMS resonator, and the admittance and insertion loss curves were obtained. The results show that when the arrangement of 4 × 7 SCC-PnC plates is adopted, the anchor quality factors of the third-order overtone, fifth-order overtone, and seventh-order overtone MEMS resonators are increased by 1656 times, 2027 times, and 16 times, respectively.

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“…Up to date, various energy loss reduction strategies for piezoelectric MEMS resonators to improve Q have been proposed and aroused much attention [13,14,15,16,17,18]. Moreover, exploiting one-dimensional (1D) or two-dimensional (2D) PnC in tethers or surrounding the resonant body of resonators is an effective technology to significantly reduce the anchor loss [19,20,21,22,23,24,25]. Even so, one of the critical challenges of PnC applied in resonators still faced by researchers is the large lattice constant compared to the associated acoustic wavelength.…”

Section: Introductionmentioning

confidence: 99%

Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation

Bao

Zhou

et al. 2019

Micromachines

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Phononic crystals (PnC) are a remarkable example of acoustic metamaterials with superior wave attenuation mechanisms for piezoelectric micro-electro-mechanical systems (MEMS) resonators to reduce the energy dissipation. Herein, a spider web-like PnC (SW-PnC) is proposed to sufficiently isolate the wave vibration. Finite-element analysis is performed to gain insight into the transmission property of finite PnC, and band characteristics by infinite periods. In comparison with the circle hole PnC at a similar bandgap, due to its already very lightweight PnC structure compared with previously reported PnCs, the proposed PnC offers a significantly lighter weight, smaller lattice constant, and greater energy leakage inhibition. More specifically, the resonator with the SW-PnC plate as the anchoring substrate exhibited a quality factor as high as 66569.7 at 75.82 MHz.

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Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Cited by 13 publications

References 62 publications

H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators

H-Shaped Radial Phononic Crystal for High-Quality Factor on Lamb Wave Resonators

Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal

Spider Web-Like Phononic Crystals for Piezoelectric MEMS Resonators to Reduce Acoustic Energy Dissipation

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