Concepts for millimeter‐wave waveguide‐MEMS phase shifters

Abstract

This article presents concepts for MEMS-enabled low-loss millimeter-wave metal ridge waveguide phase shifters. Design examples for 80 GHz show 2.6 dB insertion loss for 90 continuously variable phase shift and 1.6 dB insertion loss for 140 phase shift, respectively.

A microdevice with large deflection for variable-ratio RF MEMS power divider applications

“…Considering the free-space wavelength at a frequency of 80 GHz being 3.75 mm, the size of the tilting plate is designed to be 1.8 mm × 0.4 mm. A deflection angle of 6 • of the microplate will be needed for the present device in order to achieve the goal of RF performance [14].…”

“…The principle of operation of the RF variable power divider has been detailed elsewhere [14]. A multi-part test fixture is manufactured by milling, wire electron-discharge techniques and gold plating.…”

“…The measurements fit quite well the simulations, but indicate higher power loss inside the device. This is believed to be due to nonperfect contacts between the different fixture parts forming the waveguide structure (see [14]). The simulation model is adapted to the particular MEMS setup measured.…”

“…Therefore, by the actuation of the vertical comb drives, the metallic plate surface will be tilted into the waveguide and achieve the function of a variable-ratio RF MEMS power divider. The power divider will work at a frequency of 80 GHz with low dissipative loss, maintaining good characteristics in terms of impedance match and port isolation [14]. In this paper, we present the design, fabrication and electromechanical characterization of the tilting microplate device.…”