Conduction and breakdown in high vacuum

Chatterton, P. A.; Holmes, Robert W.; Schefer, P. V.

doi:10.1109/dld.1970.7739912

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1974

2023

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Cited by 9 publications

(1 citation statement)

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“…The prototype device emits electrons from the cathode surface when a high electric field is applied between the electrodes in a vacuum (see Figure 1). This phenomenon, known as the Fowler‐Nordheim (F‐N) theory, 5,6 expresses current characteristics as the field emission current J , 7 where

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is the work function, β is the field enhancement factor, S is the electron emission area factor, and E is the electric field.…”

Section: Prototypementioning

confidence: 99%

Investigation of vacuum measurement by nano‐gap device

Komiya,

Nagata,

Yamaoka

et al. 2023

Elect Comm in Japan

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Advances in microfabrication technology have enabled electron beam lithography (EB lithography) systems to produce microfabrication on the order of 10 of nanometers. Using this technology, we have fabricated nanogap electrodes that can generate large electric fields at low voltages. The gap between the tips of the fabricated electrodes is 100 nm, and the curvature of each tip is 50 nm. The device was confirmed to work as an electronic vacuum gauge, the device successfully measured vacuum from 10−3 to 1 Pa at the electrode voltage of 3 V.

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