We present direct experimental evidence of the coexistence of deep levels with intrinsic quantum confinement states in large, self-assembled InAs quantum dots embedded in a GaAs matrix. The InAs quantum dots show very good optical properties, as evidenced by the strong photoluminescence at room temperature at ϳ1.3 m. Deep levels 160 and 484 meV below the GaAs conduction band edge have been identified at large reverse biases and high temperatures using deep level transient spectroscopy ͑DLTS͒ measurements. The reverse-bias dependence of the DLTS signal together with experimental results from the reference samples, containing thin InAs layers but no quantum dots, confirms that the deep levels coexist in the same layer as the InAs dots, and are most likely caused by the strain field during the lattice mismatched growth process. The densities of the deep levels in the structure are comparable to the density of the optically active quantum dots.Considerable efforts have been expended in the study of self-assembled semiconductor quantum dots ͑QDs͒, grown by the Stranski-Krastanov growth mode, because of their importance in device applications and in fundamental physics. 1,2 The excellent optical properties, such as strong photoluminescence ͑PL͒ intensity, are generally attributed to the coherent nature, i.e., defect free, of the QD islands. 1-6 In recent years, however, an increasing number of experiments have suggested the possibility that electronic deep levels might exist around or in what were regarded as coherent QDs that exhibit strong PL signals. For example, the presence of defects was suggested as a possible reason for the absence of the so-called phonon-bottleneck effect. 7,8 Other optical experiments, such as the quenching of PL signals at high temperatures, also suggested the possible existence of deep level defects around the QDs. 9-11 Dai et al. pointed out that the defect related centers existed at the InAs/ GaAs interface and played an important role in the PL quenching process. 12 They also indicated that the energy of the interface defects depended on the size of the quantum dots. By performing timeresolved optical characterizations of InAs QDs in GaAs, Fiore et al. speculated on the existence of nonradiative traps in the ͑In͒GaAs matrix in the close vicinity of the QDs, which would capture the carriers before they relaxed into the QDs. 13 Despite the evidence of the existence of unknown deep levels, the optical experiments could not provide confirmation and direct information, such as energy levels and concentrations, of possible deep levels due to their generally nonradiative nature. The electrical space-charge technique, deep level transient spectroscopy ͑DLTS͒, 14 has recently been used to characterize QD structures, but most efforts have been focused on the intrinsic QD states. 15-21 The electrons can be thermally emitted out from the dots and then be detected by DLTS only when their electronic states are lifted above the bulk Fermi level. Therefore, by careful adjustment of the filling/reverse b...