Highly textured FeSb 2 films were produced on quartz wafers by a sputtering method. Their resistivity and Seebeck coefficient ͑S͒ were measured and a maximum absolute value of S ϳ 160 V K −1 at 50 K was obtained. Hall measurements were employed to study the charge carrier concentrations and Hall mobilities of the FeSb 2 films. By comparing with the transport properties of FeSb 2 single crystals and an extrinsically doped FeSb 1.98 Te 0.02 single crystal, the thermoelectric properties of the FeSb 2 films are demonstrated to be dominated by the intrinsic properties of FeSb 2 at a high charge carrier concentration.