Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Dynamic analysis of bifurcating, non-linear thin film micro-structures

“…Eastman Kodak string models for the GEMS device were used as the basis for comparison [23]. The model structure consists of a single layer thin film micro-device suspended above a regular array of spacing structures, shown shaded in Fig.…”

“…Comparisons between Eastman Kodak experimental data [23] and the fundamental undamped natural frequency of the numerical model indicated that in the regions of interest damping did not significantly impact the numerical results obtained. Thus, a Rayleigh damping model was adopted with 5% critical damping in modes 1 and 10.…”

“…It is also observed in thin cantilever structures, and torsional flaps, used in a variety of sensor and actuator MEMS applications. Examples of MEMS structures under electrostatic actuation include: DMD micromirror device [27], grating light valve (GLV) [3,,13,25], and grating-electro-mechanical system (GEMS) [22][23][24]. The structure illustrated in Fig.…”

A reflective tunable blazed-grating for high energy femtosecond laser pulses

“…Grating electromechanical systems (GEMS) are electrostatically actuated membrane based devices [1]. Other concepts for tunable gratings are based on electrostatically actuating a reflective membrane on a viscoelastic material [2] or using a liquid crystal based design [3].…”

Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometry

“…GLV technology has been turned into commercialization successfully by the Silicon Light Machines (SLM) Corp. since 1994. As the GLV technology has achieved great success, a lot of micro programmable gratings were developed in the last decade, most of which were the phase gratings (Hocker et al 2000;Hung and Senturia 1999;Kim et al 2004;Kowarz et al 2002;Sene et al 1996), leaving a small percentage for the blazed gratings (Burns and Bright 1997;Burns and Bright 1998) and pitch-tunable gratings (Wong et al 2004;Yan and Lal 2006).…”