Rotational spectra for two conformers of c-C 3 H 5 SiHFCH 3 (cyclopropylfluoromethyl silane, CFMS) and one conformer of c-C 3 H 5 SiF 2 CH 3 (cyclopropyldifluoromethyl silane, CDFMS) have been observed by a combination of chirped-pulse and resonant cavity Fouriertransform microwave spectroscopy in the 7.5-16.5 GHz range. All rotational transitions were doubled by up to several megahertz into A and E states as a result of methyl group internal rotation, and analysis of measured transitions using a combined axis method yielded internal rotation barriers of ca. 6.0 kJ mol -1 for the two conformers of CFMS and ca. 5.2 kJ mol -1 for CDFMS, revealing a systematic decrease in the barrier as fluorine atoms are added to the silicon.Dipole moment information is also available for the CDFMS species.