2022
DOI: 10.1016/j.matpr.2022.04.242
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Consequences of variation in oxygen partial pressure on zirconium oxide thin films

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Cited by 5 publications
(2 citation statements)
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“…Crystallinity and XRD peak intensity both drop when the Ar partial pressure is zero. Some reported results are also opposite the current results [41]. Further investigation is required to clarify this relationship.…”
Section: Xrd Analysiscontrasting
confidence: 92%
“…Crystallinity and XRD peak intensity both drop when the Ar partial pressure is zero. Some reported results are also opposite the current results [41]. Further investigation is required to clarify this relationship.…”
Section: Xrd Analysiscontrasting
confidence: 92%
“…Thin films formed at different substrate temperatures and powers show a rise in the icing time delay, as shown in Table 2. Consistent with what was found in the referenced literature, increasing the surface roughness improved the contact angle [50,51]. Furthermore, differences in temperature and RF power of formed thin films are connected with the composition of chemicals of the coatings when they are developed.…”
Section: Cosɵ = Acosɵ`supporting
confidence: 87%