Consideration of Thermo-Vacuum Stability of a MEMS Gyroscope for Space Applications

Abstract

Thermo-vacuum stability of the aerospace gyroscopes is one of the crucial issues in the harsh and remote environment of space. This paper reports a bias drift compensation algorithm for the MEMS (microelectromechanical systems) gyroscope with atmosphere package. This approach takes advantage of linear frequency–temperature dependence and linear amplitude–pressure dependence for self-compensation of the gyroscope bias drifts in real-time. The dependences were analyzed and evaluated by subjecting the gyroscope to a thermo-vacuum condition. The real-time self-compensation yielded a total bias error of 0.01°/s over a temperature range of 7–45 °C. A MEMS rate sensor was flown in space and the on-orbit data also verify the effectiveness of the approach.

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

“…At high temperatures, thermal stresses generated by different materials can cause deformation of the sensor package, which can lead to bias and scale factor instability. The failure modes mainly include fatigue, fracture, open circuit, and delamination [ 62 , 63 ].…”

“… MEMS gyroscopes Temperature compensation models of first-order, second-order, and higher-order based on the particle swarm optimization algorithm The SD (standard deviation) of the output signal was reduced by about four times. 2021 [ 83 ] Bias drift compensation algorithm for the MEMS gyroscope with atmosphere package A total bias error of 0.01 °/s over a temperature range of 7∼45 °C 2020 [ 63 ] Back propagation artificial neural networks for temperature calibration The accuracy of MEMS gyroscopes was improved by 20 %. 2018 [ 78 ] The quality factor of the bifurcation sensor was increased to 1000 Mechanical-thermal and electrical-thermal noise have no influence on the bifurcation sensors.…”

Influence of Barrier Layers on ZrCoCe Getter Film Performance

“…Microelectromechanical system (MEMS) devices have been used in aerospace [ 1 ], biomedical [ 2 ], automotive [ 3 ], communications [ 4 ], as well as other high-tech fields [ 5 , 6 ], many of which use Ge as a substrate [ 7 , 8 , 9 ]. Getter films have attracted significant attention for their sorption performance in maintaining and improving the vacuum degree in MEMS vacuum devices for extended periods [ 10 , 11 , 12 , 13 ].…”