Considerations on pre-stress in a 3D-printed capacitive force/pressure sensor

Faller, Lisa-Marie; Zangl, Hubert

doi:10.1109/eurosime.2017.7926279

Cited by 5 publications

(3 citation statements)

References 10 publications

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“…The capacitance affects the read-out circuit sensitivity and dynamic performance [44]; therefore, reducing the capacitance deviation from the nominal value positively impacts the read-out electronics performance. Since it is found that the geometry variations influence the CMUT static capacitance more than bias-induced diaphragm prestress [45], this parameter was added to the computed figures of merit. Considering the acoustic performance of the CMUT, the sensitivity of the transmission and reception transfer functions is analyzed in terms of gain and phase, in addition to bandwidth, to investigate the impact of process-related variations also on the amplitude as well as on the time delay of the transmitted or received signal.…”

Section: ) Choice Of Response Variablesmentioning

confidence: 99%

Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays

Mura

Bagolini

Lamberti

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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This paper addresses the assessment of the variability of CMUT arrays' electro-mechanical and acoustic performance, as related to the tolerance of the CMUT vertical dimensions due to the microfabrication process. A 3-factors 3-levels factorial sensitivity analysis is carried out to compute the main effects and the interaction effects of the moving plate thickness, the passivation layers thickness, and the sacrificial layer thickness, on the CMUT resonance frequency, collapse voltage, and static capacitance, as well as on the transmission and reception sensitivity amplitude and bandwidth and time delay in watercoupled condition. The analysis is performed by means of FEM simulations of the CMUT static behavior and dynamic response, and the findings are compared to experimental data.

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Section: ) Choice Of Response Variablesmentioning

confidence: 99%

Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays

Mura

Bagolini

Lamberti

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

show abstract

“…For the ceramics diaphragm, these simulations are further subjected to a space-filling Design Of Computer Experiments with respect to geometrical variations (compare [37,49]). This is done to evaluate the consequences of variations originating from the printing processes.…”

Section: Finite Element Simulationsmentioning

confidence: 99%

Rapid prototyping of force/pressure sensors using 3D- and inkjet-printing

Faller

Granig

Krivec

et al. 2018

J. Micromech. Microeng.

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This work reports on inkjet- and 3D-printed force/pressure sensing devices. The employed printing processes can enable cost- and resource-efficient, fast and flexible designs compared to solid-state technology which is used as a reference design. The pressure sensing devices are realized as either 3D-printed steel or 3D-printed ceramic diaphragms. Both designs thus withstand harsh environmental conditions and elevated temperatures. Additionally, the increased size guarantees less sensitivity to dirt or moisture due to the larger diameter of the diaphragms. The hardware used for the capacitive sensor read-out is based on a shunt measurement system and subsequent demodulation. This architecture enables long cabling, allowing for large parasitic capacitances, without significant loss of transferred signal power, due to the employed power matching to the transmission line. Physical analyses such as contact angle measurements, profilometer measurements, and focused ion beam analysis are done to characterize the resulting printed surfaces. Then, the response of both designs is evaluated by applying force on the diaphragms surface using a moveable load cell. The gathered results are also compared to finite element method simulations.

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“…The bonding of the strain gauge and the installation of the optical fiber also brings alignment errors and restricted sensors performance [1,9]. Moreover, most of this research only uses one kind of 3D printing technology and a single raw material [10,11,12], and these methods are difficult to use to form a composite structure. Although Eijking and Schouten et al [13,14] have used fused deposition manufacturing (FDM) technology to fabricate a series of force sensors with different materials to form a composite structure, the precision of FDM technology is low [2] and the fabricated sensor structure is rough, making it difficult to fabricate high-precision micro-nano sensors.…”

Section: Introductionmentioning

confidence: 99%

Research of a Novel 3D Printed Strain Gauge Type Force Sensor

et al. 2018

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A 3D printed force sensor with a composite structure developed by combining digital light processing (DLP) based printing and inkjet printing technologies is described in this paper. The sensor has cost effectiveness and time-saving advantages compared to the traditional sensor manufacturing process. During this work, the substrate of the force sensor was printed by a DLP based 3D printer using a transparent high-temperature resin, and the strain gauge of the force sensor was inkjet printed using poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT/PSS) conductive ink. Finite element (FE) simulation was conducted to find the print origin of the strain gauge. The relationship between the mechanical properties of the post-cured resin and the curing time was investigated and the resistance of the printed strain gauges was characterized to optimize process parameters. Afterward, the force sensor was characterized. Experimental results show that the sensitivity of the sensor is 2.92% N−1 and the linearity error is 3.1485% full scale (FS) within the range from 0 mN–160 mN, and the effective gauge factor of the strain gauge is about 0.98. The resistance drifting is less than 0.004 kΩ within an hour. These figures prove that the device can perform as a force sensor and 3D printing technology may have great applied potential in sensor fabrication.

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Considerations on pre-stress in a 3D-printed capacitive force/pressure sensor

Cited by 5 publications

References 10 publications

Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays

Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays

Rapid prototyping of force/pressure sensors using 3D- and inkjet-printing

Research of a Novel 3D Printed Strain Gauge Type Force Sensor

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