Constructing optical microsystems based on the hydrophobic effect: comparison of microlens arrays fabricated by different methods

Zimmer, F.; Moench, W.; Zappe, Hans

doi:10.1109/omems.2003.1233471

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“…Micro-lens arrays have also been demonstrated by dipping a patterned substrate with hydrophobic regions through a monomer solution floating on water. 26 The monomer solution (poly-alcylmethacrylate) was subsequently polymerized.…”

Section: Polymer Micro Lensesmentioning

confidence: 99%

Optical MEMS and polymers: an overview (Invited Paper)

Patterson

2005

SPIE Proceedings

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Polymer materials offer unique properties for fabrication of micro-optical systems. The ability to engineer the optical and mechanical properties of polymers, the low cost of polymers, and the wide choice of fabrication methods make polymers particularly attractive for low cost, and potential mass production of micro-optical elements and integrated micro-optical systems. An overview of the current state of the art in polymer micro-optic fabrication technology and applications to optical MEMS is presented.

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Section: Polymer Micro Lensesmentioning

confidence: 99%