Construction of conducting and photoconducting 3D structures with submicron resolution in electrooptical substrates

Siman-Tov, Heli; Gumennik, Alexander; Ilan, Har’el; Mazursky, Noa; Agranat, Aharon J.

doi:10.1007/s00339-010-6064-7

Cited by 3 publications

(3 citation statements)

References 16 publications

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“…This can be the basis for a selective etching technique that can be used for the construction of grooves, trenches with steep aspect ratio, and suspended structures for constructing devices cladded by air [13]. In addition, recent investigations of structures formed by the implantation of a high fluence of protons were shown these to be electrically conductive and photoconductive [19].…”

Section: Discussionmentioning

confidence: 99%

“…A pre-condition for achieving significant diffraction efficiency is a sufficient quantity of grating periods [23]. However, the absorption induced by the proton implantation [19] has limited the propagation distance in the waveguide. Therefore, an annealing process has been applied to the implanted crystal in order to diffuse the protons outside the active region.…”

Section: Fabricationmentioning

confidence: 99%

“…Hence a combination of a series of implantation sessions, at different initial energies, through a respective set of stopping masks can be used to form complex multi-level 3D structures, with submicron features within the depth of a substrate. In addition to the RI reduction induced by the amorphization, the implantation of protons at high fluences creates an absorbing submicron-thick layer, which exhibits both electrical conductivity and photoconductivity [19,20].…”

Section: Introductionmentioning

confidence: 99%

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A Bragg grating embedded in a slab waveguide fabricated by the implantation of high-energy light ions in KLTN substrate

et al. 2013

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Electro-optically tunable transmission grating was imprinted in potassium lithium tantalate niobate by irreversible spatial patterning of the dielectric constant. While embedded into waveguided architecture, it provides a reliable and versatile building block for opto-electronic circuitry, capable of both active switching and multiplexing. Realization of such a block is critical for fabrication of integrated photonic circuits in electrooptic substrates by means of Refractive Index Engineering by fast ion implantation.

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Section: Discussionmentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Bragg grating embedded in a slab waveguide fabricated by the implantation of high-energy light ions in KLTN substrate

et al. 2013

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Investigation of the conduction in an implanted layer of protons in a potassium lithium tantalate niobate substrate

2012

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Electrically controlled absorption in a slab waveguide formed by the implantation of protons in a potassium lithium tantalate niobate substrate

Ilan

Agranat

2012

Applied Physics Letters

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Electrically controlled absorption was observed in a slab waveguide, fabricated in a potassium lithium tantalate niobate substrate by proton implantation, at an energy of E=1.15 MeV and a fluence of 6.1×1016ions/cm2. The implantation created an amorphous layer which acted as the cladding with an adjacent proton doped layer at its bottom. It is suggested that a n-i junction is formed at the interface between the proton layer and the substrate, which is the core of the waveguide. The electrically controlled absorption is attributed to changes in the width of the depletion area of the n-i junction induced by the applied field.

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Construction of conducting and photoconducting 3D structures with submicron resolution in electrooptical substrates

Cited by 3 publications

References 16 publications

A Bragg grating embedded in a slab waveguide fabricated by the implantation of high-energy light ions in KLTN substrate

A Bragg grating embedded in a slab waveguide fabricated by the implantation of high-energy light ions in KLTN substrate

Investigation of the conduction in an implanted layer of protons in a potassium lithium tantalate niobate substrate

Electrically controlled absorption in a slab waveguide formed by the implantation of protons in a potassium lithium tantalate niobate substrate

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