Construction of Tactile Measuring Probes for Coordinate Measurement

Hermann, Gyula; Santha, Gergo

doi:10.1016/j.mspro.2014.07.339

Cited by 5 publications

(7 citation statements)

References 9 publications

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“…Pre-measuring models have great potential regarding the analytical expression of the probe working mechanism. Trigger probes typically have three arms [2][3][4][5][6], four arms [7][8][9] or six arms [10,11], and the corresponding models are generally consistent with the regular structure. Moreover, traditional mechanics provides common methods to derive the model.…”

Section: Introductionmentioning

confidence: 93%

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A flexible-hinge touch probe using a 3D parametric model and positioning method

Zheng¹,

Guo²,

Liu³

2018

Meas. Sci. Technol.

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Models play important roles in the design, simulation and measurement of touch probes. Although existing pre-measuring and empirical models can ensure measuring accuracy and resolution, they are independent of each other. Additionally, pre-measuring models have complex expressions with limited assumptions, while empirical ones ignore the probe’s working process. In this paper, a flexible-hinge touch probe with a decoupled Hexflex structure is proposed, and a corresponding three-dimensional (3D) parametric model is established by force-displacement analysis. The decoupled model exhibits a theoretical relationship between the displacement vector (system input), and z-axis-displacement vector (system output). The 3D coupling characteristics are analyzed in depth by investigating the interaction among the coupling variables in the model, and are further verified by a finite element simulation. Additionally, with the proposed model, the positioning method for the contact points and the corresponding calibration method are investigated in the spherical coordinate system, which is based on the assumption of direction consistency between the probing force and the spatial displacement of the stylus ball.

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Section: Introductionmentioning

confidence: 93%

“…Touch-trigger probes and three-dimensional (3D) contacting micro-probes [1] typically have multi-arm structures [2][3][4][5][6][7][8][9][10][11], and account for a big share of high-precision measurement applications. Various probes have good measuring performance in accuracy and resolution.…”

Section: Introductionmentioning

confidence: 99%

A flexible-hinge touch probe using a 3D parametric model and positioning method

Zheng¹,

Guo²,

Liu³

2018

Meas. Sci. Technol.

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“…The sensitivity and resolution of the probe for a nanometer-scale CMM (or nano-CMM) have a significant impact on its performance (Weckenmann et al, 2006). In recent years, a variety of nano-CMM probe systems have been investigated, such as silicon-based (Haitjema et al, 2001), piezoresistive effect-based (Dai et al, 2009), flexure structurebased (Küng et al, 2007), boss membrane structures (Tibrewala et al, 2009;Hermann and Sántha, 2009), floating mechanism (Chu and Chiu, 2007;Fan et al, 2010) and single fiber (Eom et al, 2009). The diameter of the stylus tip of a nano-CMM probe is often small.…”

Section: Introductionmentioning

confidence: 99%

Development and characterization of a high-sensitivity fiber Bragg grating-based vibrating nano-probe for 3D measurement

Liu

Wang

Chen

et al. 2019

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Purpose There is an increasing demand for higher-accuracy dimensional measurements of nano- and micro-structures. Recently, the authors presented a fiber Bragg grating (FBG) sensor-based dynamic nano-coordinate-measuring machine (CMM) probe for true three-dimensional coordinate measurement, in which a specific mechanical structure with several FBG sensors was developed to provide the probe with sensitivity to loading in all directions. Design/methodology/approach The study presents a three-dimensional sensing and demodulation system based on an improved matched filter design and the time division multiplexing technique that helps solve the problem of multiplex FBG-signals conflicts. In addition, the application of the dynamic mode of the probe system effectively solves the problem presented by the surface interaction forces. Findings Consequently, this FBG-based vibrating probe system has increased sensitivity to strain, while maintaining smaller contact force. The experiments for testing probe performance show that the prototype yielded a measurement resolution of 13 nm, a repeatability of 50 nm and a vertical measurement force of less than1.5 mN. Research limitations/implications The force tests in the horizontal directions are difficult to conduct because both the probe and the dynamometer are only adaptable to vertical use. Practical implications Development of the FBG-based dynamic nano-coordinate-measuring machine probe will achieve a new and inexpensive method for higher-accuracy dimensional measurements of nano- and micro-structures, such as micro-electromechanical systems, micro-fluidic chips, inkjet and diesel engine injector nozzles that are in overall dimensions within the micrometer scale. Originality/value The study presents a three-dimensional sensing and demodulation system for the vibrating nano-coordinate-measuring machine probe based on FBG sensors. The prototype yielded a measurement resolution of 13 nm, a repeatability of 50 nm and a vertical measurement force of less than1.5 mN.

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“…Instead, this probe should be designed in such a way as to avoid the risk of plastic damage caused by the probing force and mass when probing the surface [2,3]. In recent years, a variety of nanometer-resolution probe systems have been investigated for micro/nano-CMMs, such as silicon-based [4], piezoresistive effect-based [5], flexure structure-based [6], boss membrane structures [7,8], floating mechanism [9,10], and single fiber [11].…”

Section: Introductionmentioning

confidence: 99%

Modeling and prototyping of a fiber Bragg grating-based dynamic micro-coordinate measuring machine probe

Liu¹,

Chen²,

Wang³

et al. 2016

Meas. Sci. Technol.

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Higher-accuracy measurements of the 3D metrology of nano-and micro-structures are increasingly demanded. This paper details the prototyping of a novel 3D micro-scale coordinate measuring machine probe based on fiber Bragg grating sensors for true 3D measurements at micro-and nanometer scales. A new manufacturing technique for the highprecision cantilever used in the probe is also reported. Simulations are performed during the design and testing to help to test important aspects of the probe and to gain understanding about the influence of the probe geometrical parameters on the sensor sensitivity. The initial performance of the probe has been tested in both the vertical and horizontal directions, and the characterization results are promising. Further experimental results demonstrate that the probe is not affected by surface interaction forces.

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Construction of Tactile Measuring Probes for Coordinate Measurement

Cited by 5 publications

References 9 publications

A flexible-hinge touch probe using a 3D parametric model and positioning method

A flexible-hinge touch probe using a 3D parametric model and positioning method

Development and characterization of a high-sensitivity fiber Bragg grating-based vibrating nano-probe for 3D measurement

Modeling and prototyping of a fiber Bragg grating-based dynamic micro-coordinate measuring machine probe

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