is restricted by the intrinsically large lattice and thermal mismatch between the epilayer and foreign substrate, which induces a mass of dislocations and the strong residual stress. [8] Generally, the large stress in III-nitrides triggers the risk for epilayer crack and the high-density dislocations act as carrier recombination centers and leakage channels, which would both lower the device performance and degrade its uniformity for the mass production. Traditional buffer layers including low-temperature aluminium nitride (AlN) nucleation layer, [9] periodic superlattice structure, [10,11] and Al metal film [12] have been widely applied, however, the total residual stress in epitaxial systems remain unchanged. In other words, the mismatch-induced dislocation and stress are partially confined in the buffer layer, and thus the optimization of crystalline quality and residual stress for III-nitride epilayers is limited. Recently, the high-quality and stress-free III-nitrides epitaxy on 2D layers (including h-BN and graphene) are developed, which is socalled as van der Waals epitaxy. [13][14][15] This innovation relies on the excellent stability and weak van der Waals interlayer interaction of 2D insert layers, which fundamentally solves the trouble induced by the heteroepitaxy. As the trade-off, the atomic flatness surface and scarce dangling bonds of h-BN and graphene have made difficulties in III-nitride nucleation. Unless the insert 2D layers are broken or atom-doped by specific treatments, including plasma or in situ nitridation, the epitaxial III-nitride could be in a high crystalline quality with the coalescent surface. [16,17] Apart from the crystalline optimization of III-nitrides, it is known that the typical III-nitride with wurtzite crystalline structure has an inversion symmetry along the c-axis orientation, possessing two opposite polar faces of Ga-polar ([0001] direction) and N-polar ([0001] direction). [18] The spontaneous polarization vector of III-nitride is determined by the polarity orientation, and thus different types of charges would be generated. As a consequence, the optical as well as electrical properties of III-nitride can be adjusted by controlling the polarization orientation. Several works prove that the proper assembly of metal-polar and N-polar III-nitrides could invert High-quality and polarity-controlled III-nitride is crucial for realizing highperformance and new types of device designs with rich functionalities, but there are still many difficulties for obtaining N-polar III-nitrides till now. In this work, the van der Waals epitaxy of high-quality N-polar gallium nitride (GaN) is reported by innovatively inserting a thin MoS 2 layer. Due to the remission of thermal and lattice mismatch by the week van der Waals force in 2D MoS 2 insert layer, the N-polar GaN exhibits high crystalline quality and reduced residual stress. The proposed atom deposition kinetics for the van der Waals epitaxy of the polarity-controlled aluminium nitride nucleation layer and GaN epilayer on the MoS 2 l...