2021
DOI: 10.1109/ted.2021.3070844
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Contact-Free MEMS Devices for Reliable and Low-Power Logic Operations

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Cited by 12 publications
(9 citation statements)
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“…In all cases, the experimental conditions correspond to water at atmospheric pressure and a mean temperature of 293.15 K. For these conditions, the 1995 IAPWS state equation formulation (Ref. [11]) gives a liquid water density ρ = 0.998207 g/cm 3 and the 2008 IAPWS formulation (Ref. [17]) gives a liquid water viscosity η = 1.0016 mPa•s.…”
Section: Presentation Of Devices and Experimental Resultsmentioning
confidence: 99%
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“…In all cases, the experimental conditions correspond to water at atmospheric pressure and a mean temperature of 293.15 K. For these conditions, the 1995 IAPWS state equation formulation (Ref. [11]) gives a liquid water density ρ = 0.998207 g/cm 3 and the 2008 IAPWS formulation (Ref. [17]) gives a liquid water viscosity η = 1.0016 mPa•s.…”
Section: Presentation Of Devices and Experimental Resultsmentioning
confidence: 99%
“…[14]) called "optical method", which consists of observing the fall of a spherical glass ball inside a tube. The ball has a radius R S = 25.4 µm and a density ρ S = 2.42 g/cm 3 . The analysis of these data in ref.…”
Section: Exploration Of the Liquid-like Phasementioning
confidence: 99%
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“…Its strong sensitivity can reach the level of measuring several or even a single inert gas atom [5][6][7], and its sensitivity can be increased to 1012 times higher than that of a traditional quartz crystal monitor [6]. It can be widely used in ultrahigh sensitivity quality detection [7], force detection [8], acceleration detection [9], high-frequency signal generation and processing [10], and high-speed logic operation [11]. It is clear that NW resonators provide unprecedented abilities to measure individual neutral molecules or atoms and will find many interesting applications in mass spectrometry and atomic physics, with great significance for environmental monitoring, industrial production, medical diagnosis, and defense and military fields.…”
Section: Introductionmentioning
confidence: 99%
“…Unlike nanoelectromechanical computing, where information is stored in a combination of mechanical motion and electrical charge [23,24], scalable purely nanomechanical gates have yet to be developed. Purely mechanical gates generally rely on parametric interactions between mechanical waves [25][26][27], but these shift the frequencies of the bits so that the output of one gate cannot easily be used as the input of the next.…”
Section: Introductionmentioning
confidence: 99%