Contact resistance in carbon nanostructure via interconnects

Abstract

We present an in-depth electrical characterization of contact resistance in carbon nanostructure via interconnects. Test structures designed and fabricated for via applications contain vertically aligned arrays of carbon nanofibers (CNFs) grown on a thin titanium film on silicon substrate and embedded in silicon dioxide. Current-voltage measurements are performed on single CNFs using atomic force microscope current-sensing technique. By analyzing the dependence of measured resistance on CNF diameter, we extract the CNF resistivity and the metal-CNF contact resistance.

RF characteristics of one-dimensional nanocarbons

“…However, contact resistance between CNT or CNF and metal remains a major challenge [2][3][4][5][6][7]. Moreover, contact resistance tends to dominate the total test device resistance [6,7].…”

“…Moreover, contact resistance tends to dominate the total test device resistance [6,7]. Previously, Wu [6] and Li [7] developed methods to extract contact resistance between CNF and underlayer metal in vertical via structures.…”

Carbon Nanotube Based Systems for High Energy Efficient Applications

“…Though field emission from carbon fibers has been known since 1973 [23], it was first in 1995 when a carbon nanotube based field emission electron source has been reported [30]. The device had an array of vertically aligned current density and stability of emission (figure 2.4).…”

“…Recently, it has also been shown that the contact resistance has a diameter dependant component, which is inversely related to the resistance term [30]. Thus, it is expected that thinner CNTs will have higher contact resistance leading to reduced emission response.…”

“…In last decade, carbon nanotube (CNT) was proposed as an excellent field emission material. Emission current and total energy distribution from different crystallographic planes of tungsten, with and without various gas adsorption on them [15][16][17][18][19] Experimental and theoretical analysis of emission of hot electrons [20] Field emission from tungsten nanowire [21] Multistage tungsten oxide nanowire and its field emission under poor vacuum condition [22] Carbon Field emission response from sharpened micro-size carbon fiber [23] Field emission from micro-and nano-sized diamond emitter arrays [24][25][26][27] Field emission from single wall-and multi wall-carbon nanotubes, in the form of arrays or individual nanotube [28][29][30][31][32][33][34][35][36][37][38][39][40][41][42] Field emission from single-layer, multi-layer and thick graphene structures [43][44][45][46][47][48][49] Silicon Large-area arrays of sharply-pointed field emitters on Si wafers [50] Molybdenum Closely packed arrays of micro-size Mo cones [51] Field emission from single crystalline MoO 3 nanobelts [52] Aluminum nitride…”