With the characteristics of nonlinearity and time variation, the position control system of electrostatic levitation facility cannot suppress the disturbance effectively by using traditional control methods. To solve this problem, a RBF-PID control strategy combining neural network and PID control method was proposed. Firstly, the mechanical analysis on the spherical sample was researched, and the mechanism model of the position control system of electrostatic levitation was deduced. Then, the position control system of electrostatic levitation was constructed, based on the RBF-PID controller. The * 中国科学院科研仪器设备研制项目(YJKYYQ20190008)和空间科学战略先导专项(XDA15013600)共同资助