2019
DOI: 10.3390/coatings9020102
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Contamination Particles and Plasma Etching Behavior of Atmospheric Plasma Sprayed Y2O3 and YF3 Coatings under NF3 Plasma

Abstract: Yttrium oxide (Y2O3) and yttrium oxyfluoride (YO0.6F2.1) protective coatings were prepared by an atmospheric plasma spraying technique. The coatings were exposed to a NF3 plasma. After the NF3 plasma treatment, the mass loss of the coatings showed that the etching rate of YO0.6F2.1 was larger than that of the Y2O3. X-ray photoelectron spectroscopy revealed that YO0.5F1.9 was present in the Y2O3 coating, whereas YO0.4F2.2 was present in the YO0.6F2.1 coating. Transmission electron microscope analysis conducted … Show more

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Cited by 26 publications
(16 citation statements)
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“…Recently, YOF and YF 3 have also drawn attention as ceramic coating materials for parts owing to their ability to suppress chemical reactions with fluoridated gases such as CF 4 and NF 3 [8][9][10][11][12][13]. Nevertheless, there have been few reports about the behavior of contamination particles by plasma etching [14]. Atmospheric plasma spraying (APS) methods are commonly used to coat parts with ceramic coating materials such as Y 2 O 3 and YF 3 .…”
Section: Introductionmentioning
confidence: 99%
“…Recently, YOF and YF 3 have also drawn attention as ceramic coating materials for parts owing to their ability to suppress chemical reactions with fluoridated gases such as CF 4 and NF 3 [8][9][10][11][12][13]. Nevertheless, there have been few reports about the behavior of contamination particles by plasma etching [14]. Atmospheric plasma spraying (APS) methods are commonly used to coat parts with ceramic coating materials such as Y 2 O 3 and YF 3 .…”
Section: Introductionmentioning
confidence: 99%
“…The small RMS difference in the latter sample might be attributed to the YOF-altered layer formed on the plasma-treated Y2O3 surface. The Y-F bonds formed by YOF in the film might reduce the reactivity of YOF with fluorine radicals during the etching process [24]. The effects of the as-deposited Y2O3 films and SF6 plasma-treated Y2O3 films before and after fluorocarbon plasma etching were determined by XPS.…”
Section: Resultsmentioning
confidence: 99%
“…At the same time, yttria is a rare earth compound, making it an expensive plasma shielding candidate. On the other hand, magnesium oxide is comparatively cheaper, making the composite of Y 2 O 3 -MgO relatively economical with better plasma resistance property than the individual oxides.To understand the erosion mechanism under CF 4 and NF 3 plasma, the erosion behavior of Y 2 O 3 , Al 2 O 3 and YF 3 have been reported 14,20,21 . An oxide surface exposed to fluorocarbon plasma was initially fluorinated and then removed by a physical process combined with thermal cycling in wafer processing equipment 21 .It is notable that the surface roughness controlled by microstructures such as the grain size and defects such as pores for both bulk parts and coating parts strongly affect the amount of etching 16,22-24 .…”
mentioning
confidence: 99%
“…To understand the erosion mechanism under CF 4 and NF 3 plasma, the erosion behavior of Y 2 O 3 , Al 2 O 3 and YF 3 have been reported 14,20,21 . An oxide surface exposed to fluorocarbon plasma was initially fluorinated and then removed by a physical process combined with thermal cycling in wafer processing equipment 21 .…”
mentioning
confidence: 99%
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