Low-loss optical planar waveguides in YVO 4 produced by silicon ion implantation at low doses J. Appl. Phys. 94, 4708 (2003); 10.1063/1.1604965Monomode, nonleaky planar waveguides in a Nd 3+ -doped silicate glass produced by silicon ion implantation at low dosesWe report on the fabrication and characterization of low-loss planar and stripe waveguides in a Nd 3+ -doped glass by 6 MeV oxygen-ion implantation at a dose of 1 ϫ 10 15 ions/ cm 2 . The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. The refractive index profile of the planar waveguide was reconstructed from a code based on the reflectivity calculation method. The results indicate that a refractive index enhanced region as well as an optical barrier have been created after the ion beam processing. The near-field mode profiles of the stripe waveguide were obtained by an end-fire coupling arrangement, by which three quasitransverse electric modes were observed. After annealing, the propagation losses of the planar and stripe waveguides were reduced to be ϳ0.5 and ϳ1.8 dB/ cm, respectively.