Continuous wavelength tuning in micromachined Littrow external-cavity lasers

Zhang, Xuming; Liu, A.Q.; Lu, Chao; Tang, Ding

doi:10.1109/jqe.2004.839685

Cited by 36 publications

(28 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In practice, at least one extra degree of freedom is required to initially align the cavity mode and grating filter and to compensate for dispersion in the optical components of the cavity. Academic research on MEMS implementations of Littrow [143], [144] and Littman [145] ECSDLs has focused on the development of accurate one-degree-of-freedom actuators that can provide stable mode-hop-free tuning after initial alignment. An interesting alternative is to use a diffractive element with separate phase and amplitude control to avoid macroscopic motion in the external cavity [146].…”

Section: Tunable Lasersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

Abstract-The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks. In this paper, we review the current state of the art of MEMS devices and subsystems for lightwave communication applications. Depending on the design, these components can either be broadband (wavelength independent) or wavelength selective. Broadband devices include optical switches, crossconnects, optical attenuators, and data modulators, while wavelength-selective components encompass wavelength add/drop multiplexers, wavelength-selective switches and crossconnects, spectral equalizers, dispersion compensators, spectrometers, and tunable lasers. Integration of MEMS and planar lightwave circuits, microresonators, and photonic crystals could lead to further reduction in size and cost.

show abstract

Section: Tunable Lasersmentioning

confidence: 99%

Optical MEMS for Lightwave Communication

Solgaard

Ford

2006

J. Lightwave Technol.

307

141

View full text Add to dashboard Cite

show abstract

“…Consequently, the position of pivot is critical. It has been proven that the continuous wavelength tuning range is limited for the Littrow configuration if the pivot position is fixed, but it can be optimized by proper choice of pivot position [16]. Theoretically, the Littman configuration does not constrain the tuning range for an optimized pivot position.…”

Section: A Applications Of Pivot To Mems Tunable Lasersmentioning

confidence: 99%

“…1). Following the parameters , , , as given in [16], a rotation angle would correspond to a wavelength tuning . Such a tuning range is quite rare for a single piece of tunable laser chip.…”

Section: B Pivot Requirements For Mems Tunable Lasersmentioning

confidence: 99%

See 1 more Smart Citation

A Real Pivot Structure for MEMS Tunable Lasers

Zhang

Liu

et al. 2007

J. Microelectromech. Syst.

Self Cite

View full text Add to dashboard Cite

This paper presents the design of a real pivot formed by a double-clamped beam for the rotational tuning structures in microelectromechanical systems (MEMS) tunable lasers. Micromechanical properties such as beam deformation, pivot position and pivot shift are investigated and compared with the virtual pivot formed by a cantilever beam. It is shown that the real pivot has negligible shift when subjected to load and fabrication error owing to its feature of structural symmetry, while the virtual pivot suffers from significant pivot shift, which would severely limit the wavelength tuning range. The two pivot designs are implemented into MEMS tuning structures that are fabricated by deep etching and released using a dry release approach. The real pivot measures a depth variation of 16% over the double-clamped beam but maintains the symmetry to the midpoint, and is still able to produce a rotation angle of 4.7 . In contrast, the virtual pivot has a depth reduction of 4% over the cantilever beam, but achieves only a 2.4 rotation due to the pull-in problem originated from the severe pivot shift. The real pivot design is more suitable for the MEMS tunable lasers as it is simple, symmetric, robust, and suitable for single-chip integration.[2006-0112]

show abstract

“…With the progress in diode laser technology, inexpensive tunable single mode diode lasers with external cavity which are also called as external cavity diode lasers (ECDLs) [54][55][56][57][58] have recently been applied for the measurements of velocity distributions of In [59], He [60], Ar discharge is also shown in Fig. 21 for comparison.…”

Section: Measurement Of Gas Temperature Using An Extra Cavity Diode Lmentioning

confidence: 99%

Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering

Matsuda

Hirashima

Mine

et al. 2013

ZnO Nanocrystals and Allied Materials

View full text Add to dashboard Cite

Inductively coupled plasma (ICP) assisted DC sputter-deposition was used for the deposition of Al-doped ZnO (AZO or ZnO:Al) thin films. With increasing ICP RF power, film properties including deposition rate, crystallinity, transparency and resistivity were improved. To understand the plasma-surface interaction, several plasma diagnostics were performed. Heat fluxes to the substrate were measured by thermal probes, number densities of sputtered metallic atom species were measured by absorption spectroscopy using hollow cathode lamps (HCL) and light emitting diodes (LEDs), and neutral gas temperatures were measured by external cavity diode laser (ECDL) absorption spectroscopy. As a result, it was revealed that the high density ICP heated the substrate through a high heat flux to the substrate, resulting in a high quality film deposition without the need for intentional substrate heating.The heat flux to the substrate was predominantly contributed by the plasma charged species, not by the neutral Ar atoms which were also significantly heated in the ICP. The substrate position where the highest quality films were obtained was found to coincide with the position where the substrate heat flux took the maximum value.

show abstract

Continuous wavelength tuning in micromachined Littrow external-cavity lasers

Cited by 36 publications

References 19 publications

Optical MEMS for Lightwave Communication

Optical MEMS for Lightwave Communication

A Real Pivot Structure for MEMS Tunable Lasers

Deposition of Aluminum-Doped ZnO Films by ICP-Assisted Sputtering

Contact Info

Product

Resources

About