Contour Extraction Assists in Distinguishing Lithographic Hotspot

Meng, Liuye; Ren, Kun; Gao, Dawei; Wu, Yongyu

doi:10.1109/iseda62518.2024.10617929

2024 2nd International Symposium of Electronics Design Automation (ISEDA) 2024

DOI: 10.1109/iseda62518.2024.10617929

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Contour Extraction Assists in Distinguishing Lithographic Hotspot

Liuye Meng,

Kun Ren,

Dawei Gao

et al.

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Contour Extraction Assists in Distinguishing Lithographic Hotspot

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